(19)
(11) EP 2 471 087 A1

(12)

(43) Date of publication:
04.07.2012 Bulletin 2012/27

(21) Application number: 10769069.5

(22) Date of filing: 29.08.2010
(51) International Patent Classification (IPC): 
H01J 37/32(2006.01)
(86) International application number:
PCT/IL2010/000707
(87) International publication number:
WO 2011/024174 (03.03.2011 Gazette 2011/09)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

(30) Priority: 27.08.2009 US 237642 P

(71) Applicant: Mosaic Crystals Ltd.
46733 Herzeliya Pituach (IL)

(72) Inventor:
  • EINAV, Moshe
    99735 Kfar Uriyah (IL)

(74) Representative: Petraz, Gilberto Luigi et al
GLP S.r.l. Piazzale Cavedalis 6/2
33100 Udine
33100 Udine (IT)

   


(54) PENETRATING PLASMA GENERATING APPARATUS FOR HIGH VACUUM CHAMBERS