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(11)
EP 2 471 087 A1
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(43)
Date of publication:
04.07.2012
Bulletin 2012/27
(21)
Application number:
10769069.5
(22)
Date of filing:
29.08.2010
(51)
International Patent Classification (IPC):
H01J
37/32
(2006.01)
(86)
International application number:
PCT/IL2010/000707
(87)
International publication number:
WO 2011/024174
(
03.03.2011
Gazette 2011/09)
(84)
Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
(30)
Priority:
27.08.2009
US 237642 P
(71)
Applicant:
Mosaic Crystals Ltd.
46733 Herzeliya Pituach (IL)
(72)
Inventor:
EINAV, Moshe
99735 Kfar Uriyah (IL)
(74)
Representative:
Petraz, Gilberto Luigi et al
GLP S.r.l. Piazzale Cavedalis 6/2
33100 Udine
33100 Udine (IT)
(54)
PENETRATING PLASMA GENERATING APPARATUS FOR HIGH VACUUM CHAMBERS