(19)
(11) EP 2 474 044 A2

(12)

(88) Date of publication A3:
14.07.2011

(43) Date of publication:
11.07.2012 Bulletin 2012/28

(21) Application number: 10814527.7

(22) Date of filing: 02.09.2010
(51) International Patent Classification (IPC): 
H01L 31/042(2006.01)
H01L 31/18(2006.01)
(86) International application number:
PCT/US2010/047748
(87) International publication number:
WO 2011/028957 (10.03.2011 Gazette 2011/10)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

(30) Priority: 09.09.2009 US 241015 P
02.09.2009 US 239416 P

(71) Applicants:
  • Bollman, Brent
    San Jose, CA 95138 (US)
  • Stanley, Nathaniel
    San Jose, CA 95138 (US)
  • Rail, Matthew Diego
    San Jose, CA 95138 (US)

(72) Inventors:
  • Bollman, Brent
    San Jose, CA 95138 (US)
  • Stanley, Nathaniel
    San Jose, CA 95138 (US)
  • Rail, Matthew Diego
    San Jose, CA 95138 (US)

(74) Representative: Boyce, Conor 
FRKelly 27 Clyde Road Ballsbridge
Dublin 4
Dublin 4 (IE)

   


(54) METHODS AND DEVICES FOR PROCESSING A PRECURSOR LAYER IN A GROUP VIA ENVIRONMENT