(19)
(11) EP 2 478 126 A1

(12)

(43) Date of publication:
25.07.2012 Bulletin 2012/30

(21) Application number: 10763585.6

(22) Date of filing: 27.07.2010
(51) International Patent Classification (IPC): 
C23C 14/00(2006.01)
C23C 14/08(2006.01)
(86) International application number:
PCT/CZ2010/000082
(87) International publication number:
WO 2011/012093 (03.02.2011 Gazette 2011/05)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

(30) Priority: 28.07.2009 CZ 20090504

(71) Applicant: SHM, s.r.o.
787 01 Sumperk (CZ)

(72) Inventors:
  • JÍLEK, Mojmír
    787 01 Sumperk (CZ)
  • HOLUBÁ , Pavel
    787 01 Sumperk (CZ)
  • ÍMA, Michal
    787 20 Dolní Studénky (CZ)

(74) Representative: Walter, Jiri 
Pocernicka 54
108 00 Praha 10
108 00 Praha 10 (CZ)

   


(54) METHOD FOR REACTIVE SPUTTERING