(19)
(11) EP 2 480 936 A1

(12)

(43) Date of publication:
01.08.2012 Bulletin 2012/31

(21) Application number: 10762638.4

(22) Date of filing: 24.09.2010
(51) International Patent Classification (IPC): 
G03F 7/20(2006.01)
G21K 1/06(2006.01)
 C01B 3/50(2006.01)
(86) International application number:
PCT/EP2010/064140
(87) International publication number:
WO 2011/036248 (31.03.2011 Gazette 2011/13)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

(30) Priority: 25.09.2009 US 245858 P

(71) Applicants:
  • ASML Netherlands BV
    5504 DR Veldhoven (NL)
  • Cymer, Inc.
    San Diego, CA 92127 (US)

(72) Inventors:
  • LOOPSTRA, Erik
    NL-5613 ES Eindhoven (NL)
  • BANINE, Vadim
    NL-5751 SB Deurne (NL)
  • SWINKELS, Gerardus
    NL-5623 LT Eindhoven (NL)
  • PEKELDER, Sven
    NL-5694 VG Breugel (NL)
  • LABETSKI, Dzmitry
    NL-3532 VL Utrecht (NL)
  • STAMM, Uwe
    37085 Goettingen (DE)
  • PARTLO, William N.
    Poway, California 92064 (US)

(74) Representative: Siem, Max Yoe Shé 
ASML Netherlands B.V. De Run 6504
5504 DR Veldhoven
5504 DR Veldhoven (NL)

   


(54) SOURCE COLLECTOR APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD