ATBECHDEDKESFRGBGRITLILUNLSEMCPTIESILTLVFIROMKCYALTRBGCZEEHUPLSK..HRIS..MTNORS..SM..................JBDM Ver 2.0.14 (4th of August) - 2999001/02490063KORRIGIERTE EUROPÄISCHE PATENTSCHRIFTB8B120220209W154deBibliographieenBibliographyfrBibliographieEP12155911.6201202172013022220180615dedede10201100447720110221DE201161444846 P20110221US2022020920220620120822201234202201052022012021070820220209202206G02B 26/10 20060101AFI20210618BHEP G01B 11/26 20130101 FI20130101BHEP G02B 26/105 20130101 LI20130214BHEP deLaserscanningmikroskop mit einer ScanspiegelvorrichtungenLaser scanning microscope with scanning mirror devicefrMicroscope à balayage laser avec dispositif de miroir de balayageEP-A2- 0 390 969WO-A1-03/012818DE-A1- 10 357 062JP-A- H0 744 647MILANOVIC V ET AL: "Monolithic high aspect ratio two-axis optical scanners in SOI", PROCEEDINGS OF THE IEEE 16TH. ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS. MEMS 2003. KYOTO, JAPAN, AN. 19 - 23, 2003; [IEEE INTERNATIONAL MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE], NEW YORK, NY : IEEE, US, vol. CONF. 16, 19 January 2003 (2003-01-19), pages 255-258, XP010636957, DOI: 10.1109/MEMSYS.2003.1189734 ISBN: 978-0-7803-7744-8Richter, StefanBerghoffsweg 607743 JenaDEMilanovic, Veljko47 Southwind CircleRichmond 94804USRudolph, GünterOttogerd-Mühlmann-Strasse 1407743 JenaDEStutz, MichelDrächslstraße 681541 MünchenDEKrampert, Gerhard330 Rose AveUnit D, Pleasanton CA 94566USCarl Zeiss Microscopy GmbH101328333PAT 4024/157-EPCarl-Zeiss-Promenade 1007745 JenaDEPatentanwälte Geyer, Fehners & Partner mbB100757532Perhamerstrasse 3180687 MünchenDEALATBEBGCHCYCZDEDKEEESFIFRGBGRHRHUIEISITLILTLULVMCMKMTNLNOPLPTRORSSESISKSMTR