(19)
(11) EP 2 491 407 A1

(12)

(43) Date of publication:
29.08.2012 Bulletin 2012/35

(21) Application number: 09850676.9

(22) Date of filing: 23.10.2009
(51) International Patent Classification (IPC): 
G01Q 40/00(2010.01)
G01B 21/32(2006.01)
(86) International application number:
PCT/US2009/061822
(87) International publication number:
WO 2011/049577 (28.04.2011 Gazette 2011/17)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

(71) Applicants:
  • Academia Sinica
    Nan-Kang Taipei (TW)
  • Liang, Chi-Ming
    Bethesda, MD 20817 (US)

(72) Inventors:
  • HWANG, Ing-Shouh
    Taipei 11529 (TW)
  • HWU, En-Te
    Taipei 11529 (TW)
  • DANZEBRINK, Hans Ulrich
    38116 Braunschweig (DE)
  • ILLERS, Hartmut
    38116 Braunschweig (DE)

(74) Representative: Hedges, Martin Nicholas 
A.A. Thornton & Co. 235 High Holborn
London WC1V 7LE
London WC1V 7LE (GB)

   


(54) ALIGNMENT AND ANTI-DRIFT MECHANISM