(19)

(11)

EP 2 501 844 A1

(12)

(43) Date of publication: 26.09.2012 Bulletin 2012/39 (21) Application number: 09850317.0 (22) Date of filing: 08.10.2009

(51) International Patent Classification (IPC):  C30B 11/00(2006.01) (86) International application number: PCT/US2009/060072 (87) International publication number: WO 2011/043777 (14.04.2011 Gazette 2011/15)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR (71) Applicant: Axt, Inc. Fremont, CA 94538 (US)	(72) Inventors: LIU, Weiguo San Leandro, CA 94577 (US) ELLIOT, A., Grant Palo Alto, CA 94303 (US) (74) Representative: Smith, Gary John  Page White & Farrer Bedford House John Street London, WC1N 2BF London, WC1N 2BF (GB)