(19)

(11)

EP 2 507 402 A1

(12)

(43) Date of publication: 10.10.2012 Bulletin 2012/41 (21) Application number: 10833707.2 (22) Date of filing: 17.06.2010

(51) International Patent Classification (IPC):  C23C 14/24(2006.01) C23C 14/26(2006.01) (86) International application number: PCT/US2010/039085 (87) International publication number: WO 2011/065998 (03.06.2011 Gazette 2011/22)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR (30) Priority: 30.11.2009 US 628189 (71) Applicant: Veeco Instruments Inc. Plainview, NY 11803 (US)

(72) Inventors: CONROY, Chad Stillwater Minnesota 55082 (US) PRIDDY, Scott Wayne Saint Loius Park Minnesota 55426 (US) DAHLSTROM, Jacob A. Cottage Grove Minnesota 55016 (US) BRESNAHAN, Rich Cottage Grove Minnesota 55016 (US) GOTTHOLD, David William Lino Lakes Minnesota 55038 (US) PATRIN, John Chanhassen Minnesota 55317 (US) (74) Representative: Jackson, Robert Patrick  Dehns St Bride's House 10 Salisbury Square London EC4Y 8JD London EC4Y 8JD (GB)