(19)

(11)

EP 2 517 227 A2

(12)

(88) Date of publication A3: 15.09.2011 (43) Date of publication: 31.10.2012 Bulletin 2012/44 (21) Application number: 10843415.0 (22) Date of filing: 19.11.2010

(51) International Patent Classification (IPC):  H01L 21/301(2006.01) (86) International application number: PCT/US2010/057381 (87) International publication number: WO 2011/087572 (21.07.2011 Gazette 2011/29)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 23.12.2009 US 646459 (71) Applicant: Intel Corporation Santa Clara, CA 95052 (US)	(72) Inventors: VARELA, Alejandro Phoenix Arizona 85032 (US) HARLING, Troy, L. Gresham Oregon 97080 (US) VANLARE, Daniel, E. Phoenix Arizona 85048 (US) (74) Representative: Rummler, Felix et al R.G.C. Jenkins & Co 26 Caxton Street London SW1H 0RJ London SW1H 0RJ (GB)