(19)
(11) EP 2 521 168 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
10.01.2018 Bulletin 2018/02

(45) Mention of the grant of the patent:
29.11.2017 Bulletin 2017/48

(21) Application number: 12166646.5

(22) Date of filing: 03.05.2012
(51) International Patent Classification (IPC): 
H01L 21/8258(2006.01)
H01L 29/66(2006.01)
H01L 21/28(2006.01)
 H01L 29/10(2006.01)
H01L 29/78(2006.01)

(54)

Method for manufacturing a hybrid MOSFET device

Verfahren zur Herstellung einer Hybrid-MOSFET-Vorrichtung

Procédé de fabrication d'un dispositif MOSFET hybride

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 03.05.2011 US 201161482129 P

(43) Date of publication of application:
07.11.2012 Bulletin 2012/45

(73) Proprietor: IMEC VZW
3001 Leuven (BE)

(72) Inventors:
  • Hoffmann, Thomas Y.
    3001 Leuven (BE)
  • Caymax, Matty
    3001 Leuven (BE)
  • Waldron, Niamh
    3001 Leuven (BE)
  • Hellings, Geert
    3001 Leuven (BE)

(74) Representative: Sarlet, Steven Renaat Irène et al
Gevers Patents Holidaystraat 5
1831 Diegem
1831 Diegem (BE)


(56) References cited: : 
US-A- 5 064 781
US-A1- 2005 275 018
US-A1- 2007 181 977
 US-A1- 2004 256 700
US-A1- 2006 172 505
US-A1- 2008 283 958
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).