(19)
(11)
EP 2 524 266 A2
(12)
(88)
Date of publication A3:
12.01.2012
(43)
Date of publication:
21.11.2012
Bulletin 2012/47
(21)
Application number:
11733170.2
(22)
Date of filing:
07.01.2011
(51)
International Patent Classification (IPC):
G03F
7/20
(2006.01)
B82Y
40/00
(2011.01)
(86)
International application number:
PCT/US2011/000029
(87)
International publication number:
WO 2011/087896
(
21.07.2011
Gazette 2011/29)
(84)
Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
(30)
Priority:
12.01.2010
US 335877 P
(71)
Applicant:
Kobrin, Boris
Pleasanton, CA 94588 (US)
(72)
Inventor:
Kobrin, Boris
Pleasanton, CA 94588 (US)
(74)
Representative:
Howson, Richard G.B.
Kilburn & Strode LLP 20 Red Lion Street
London WC1R 4PJ
London WC1R 4PJ (GB)
(54)
NANOPATTERNING METHOD AND APPARATUS