(19)
(11) EP 2 524 266 A2

(12)

(88) Date of publication A3:
12.01.2012

(43) Date of publication:
21.11.2012 Bulletin 2012/47

(21) Application number: 11733170.2

(22) Date of filing: 07.01.2011
(51) International Patent Classification (IPC): 
G03F 7/20(2006.01)
B82Y 40/00(2011.01)
(86) International application number:
PCT/US2011/000029
(87) International publication number:
WO 2011/087896 (21.07.2011 Gazette 2011/29)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 12.01.2010 US 335877 P

(71) Applicant: Kobrin, Boris
Pleasanton, CA 94588 (US)

(72) Inventor:
  • Kobrin, Boris
    Pleasanton, CA 94588 (US)

(74) Representative: Howson, Richard G.B. 
Kilburn & Strode LLP 20 Red Lion Street
London WC1R 4PJ
London WC1R 4PJ (GB)

   


(54) NANOPATTERNING METHOD AND APPARATUS