(19)

(11)

EP 2 531 888 A1

(12)

(43) Date of publication: 12.12.2012 Bulletin 2012/50 (21) Application number: 10706563.3 (22) Date of filing: 05.02.2010

(51) International Patent Classification (IPC):  G03F 7/00(2006.01) (86) International application number: PCT/EP2010/051399 (87) International publication number: WO 2011/095217 (11.08.2011 Gazette 2011/32)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR (71) Applicant: Obducat AB 20125 Malmö (SE)	(72) Inventors: KEIL, Matthias S-211 45 Malmö (SE) LUO, Gang S-22646 Lund (SE) ZHOU, Ye S-22657 Lund (SE) (74) Representative: Aurell, Henrik  Albihns.Zacco AB P.O. Box 4289 203 14 Malmö 203 14 Malmö (SE)