(19)
(11) EP 2 534 278 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
27.05.2015 Bulletin 2015/22

(45) Mention of the grant of the patent:
01.04.2015 Bulletin 2015/14

(21) Application number: 11704333.1

(22) Date of filing: 11.02.2011
(51) International Patent Classification (IPC): 
C23C 16/54(2006.01)
C23C 16/458(2006.01)
 C23C 16/455(2006.01)
(86) International application number:
PCT/NL2011/050100
(87) International publication number:
WO 2011/099858 (18.08.2011 Gazette 2011/33)

(54)

METHOD AND APPARATUS FOR DEPOSITING ATOMIC LAYERS ON A SUBSTRATE

VERFAHREN UND VORRICHTUNG ZUR ABLAGERUNG ATOMARER SCHICHTEN AUF EINEM SUBSTRAT

PROCÉDÉ ET APPAREIL POUR DÉPOSER DES COUCHES ATOMIQUES SUR UN SUBSTRAT

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 11.02.2010 EP 10153381

(43) Date of publication of application:
19.12.2012 Bulletin 2012/51

(60) Divisional application:
15161172.0

(73) Proprietor: Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
2595 DA 's-Gravenhage (NL)

(72) Inventors:
  • VERMEER, Adrianus Johannes Petrus Maria
    NL-5666 BW Geldrop (NL)
  • ROOZEBOOM, Freddy
    NL-5582 ED Waalre (NL)
  • VAN DEELEN, Joop
    NL-5612 JH Eindhoven (NL)

(74) Representative: Jansen, Cornelis Marinus et al
V.O. Johan de Wittlaan 7
2517 JR Den Haag
2517 JR Den Haag (NL)


(56) References cited: : 
WO-A1-2011/053446
 US-A1- 2009 081 885
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).