|
(11) | EP 2 543 475 A3 |
| (12) | EUROPEAN PATENT APPLICATION |
|
|
|
|
|||||||||||||||||||||||
| (54) | Method for grinding thin sheet-like workpiece and double-end surface grinder |
| (57) [Object] To reduce influences of external forces that are to be applied to a carrier
ring and improve workpiece grinding precision, and maintain high grinding precision
over a long period of time without problems such as wear, etc. [Solution Means] In a double-end surface grinder that grinds both surfaces of a thin sheet-like workpiece W by a pair of grinding wheels 3 while rotating the workpiece W via a carrier 4 in a state where the workpiece W fitted to the carrier 4 is supported by static pressures of a pair of static pressure pads 1 in a non-contact manner, a plurality of static pressure carrier guides 6a and 6b that support a carrier ring 5 on the outer periphery of the carrier 4 by static pressures in a non-contact manner are provided in the circumferential direction. The carrier ring 5 has a cylindrical outer peripheral surface 12, and in proximity to the outer peripheral surface 12, static pressure carrier guides 6a and 6b are disposed at substantially even intervals. The static pressure carrier guides 6a and 6b may be fixed or floatable. |