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EP 2 545 281 A1

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(43) Date of publication: 16.01.2013 Bulletin 2013/03 (21) Application number: 11753520.3 (22) Date of filing: 09.03.2011

(51) International Patent Classification (IPC):  F04D 13/06(2006.01) H02K 7/14(2006.01) H02P 21/00(2006.01) F04D 15/00(2006.01) H02K 11/00(2006.01) H02P 27/04(2006.01) (86) International application number: PCT/JP2011/056132 (87) International publication number: WO 2011/111865 (15.09.2011 Gazette 2011/37)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 10.03.2010 JP 2010052509 (71) Applicant: Ebara Corporation Tokyo 144-8510 (JP)	(72) Inventors: OGAWA, Takahiko Tokyo 144-8510 (JP) KATAOKA, Tadashi Tokyo 144-8510 (JP) OZAWA, Takahide Tokyo 144-8510 (JP) KOMAI, Masakazu Tokyo 144-8510 (JP) (74) Representative: Wimmer, Hubert  WAGNER & GEYER Gewürzmühlstrasse 5 80538 München 80538 München (DE)