(19)
(11) EP 2 548 033 A2

(12)

(88) Date of publication A3:
15.03.2012

(43) Date of publication:
23.01.2013 Bulletin 2013/04

(21) Application number: 11757128.1

(22) Date of filing: 21.03.2011
(51) International Patent Classification (IPC): 
G01Q 60/24(2010.01)
G01Q 30/10(2010.01)
(86) International application number:
PCT/US2011/029232
(87) International publication number:
WO 2011/116389 (22.09.2011 Gazette 2011/38)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 19.03.2010 US 315580 P

(71) Applicant: Bruker Nano, Inc.
Santa Barbara, CA 93117 (US)

(72) Inventors:
  • RUITER, Anthonius, G.
    Goleta CA 93117 (US)
  • MITTEL, Henry
    San Ramon CA 94583 (US)

(74) Representative: Winter, Brandl, Fürniss, Hübner, Röss, Kaiser, Polte - Partnerschaft 
Bavariaring 10
80336 München
80336 München (DE)

   


(54) LOW DRIFT SCANNING PROBE MICROSCOPE