(19)
(11)
EP 2 563 689 A1
(12)
(43)
Date of publication:
06.03.2013
Bulletin 2013/10
(21)
Application number:
11775403.6
(22)
Date of filing:
02.05.2011
(51)
International Patent Classification (IPC):
B65D
85/00
(2006.01)
(86)
International application number:
PCT/US2011/000777
(87)
International publication number:
WO 2011/136856
(
03.11.2011
Gazette 2011/44)
(84)
Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
(30)
Priority:
30.04.2010
US 343583 P
(71)
Applicant:
Fortrend Engineering Corporation
Sunnyvale, CA 94085 (US)
(72)
Inventor:
WU, Kung, Chris
Cupertino CA 95014 (US)
(74)
Representative:
HOFFMANN EITLE
Patent- und Rechtsanwälte Arabellastrasse 4
81925 München
81925 München (DE)
(54)
OPENER FOR EXTREME ULTRA VIOLET LITHOGRAPHY RETICLE PODS