(19)

(11)

EP 2 569 646 A2

(12)

(88) Date of publication A3: 01.03.2007 (43) Date of publication: 20.03.2013 Bulletin 2013/12 (21) Application number: 06739525.1 (22) Date of filing: 23.03.2006

(51) International Patent Classification (IPC):  G01R 31/26(2006.01) H01L 21/66(2006.01) (86) International application number: PCT/US2006/010779 (87) International publication number: WO 2006/104886 (05.10.2006 Gazette 2006/40)

(84) Designated Contracting States: DE FR GB (30) Priority: 28.03.2005 US 665676 P 27.04.2005 US 116884 (71) Applicant: Texas Instruments Incorporated Dallas, TX 75265-5474 (US)	(72) Inventor: STILLMAN, Daniel, J. Garland, Texas 75044 (US) (74) Representative: Holt, Michael  Texas Instruments Limited European Patents Department 800 Pavilion Drive Northampton NN4 7YL Northampton NN4 7YL (GB)