| (84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
| (30) |
Priority: |
26.09.2011 US 201113245280 18.01.2012 US 201213352643
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| (43) |
Date of publication of application: |
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27.03.2013 Bulletin 2013/13 |
| (73) |
Proprietor: Versum Materials US, LLC |
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Tempe, AZ 85284 (US) |
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| (72) |
Inventors: |
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- Smith, Anthony John
New Tripoli, PA Pennsylvania 18066 (US)
- Barthold, Jeffery C.
Walnutport, PA Pennsylvania 18088 (US)
- Dax, William John
Orefield, PA Pennsylvania 18069 (US)
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| (74) |
Representative: Beck Greener |
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Fulwood House
12 Fulwood Place London WC1V 6HR London WC1V 6HR (GB) |
| (56) |
References cited: :
EP-A1- 0 391 269 US-B1- 6 269 834
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WO-A2-2008/143739
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