(19)

(11)

EP 2 577 716 A1

(12)

(43) Date of publication: 10.04.2013 Bulletin 2013/15 (21) Application number: 11787284.6 (22) Date of filing: 24.05.2011

(51) International Patent Classification (IPC):  H01L 21/28(2006.01) (86) International application number: PCT/US2011/037813 (87) International publication number: WO 2011/149989 (01.12.2011 Gazette 2011/48)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 28.04.2011 US 201113096860 25.02.2011 US 201113035791 24.05.2010 US 347540 P (71) Applicant: Shocking Technologies Inc San Jose, CA 95138 (US)	(72) Inventors: FLEMING, Robert San Jose, California 95138 (US) GRAYDON, Bhret San Jose, California 95138 (US) VASQUEZ, Daniel San Jose, California 95138 (US) WU, Junjun San Jose, California 95138 (US) RAZAVI, Farhad San Jose, California 95138 (US) (74) Representative: Fugl, Charlotte Valentin et al Awapatent A/S Rigensgade 11 1316 København K 1316 København K (DK)