(19)

(11)

EP 2 577 718 A2

(12)

(88) Date of publication A3: 19.04.2012 (43) Date of publication: 10.04.2013 Bulletin 2013/15 (21) Application number: 11789983.1 (22) Date of filing: 23.05.2011

(51) International Patent Classification (IPC):  H01L 21/304(2006.01) (86) International application number: PCT/KR2011/003747 (87) International publication number: WO 2011/152625 (08.12.2011 Gazette 2011/49)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 01.06.2010 KR 20100051685 (71) Applicant: LG Siltron Inc. Gumi, Gyeongsanbuk-do 730-350 (KR)	(72) Inventor: AN, Sang Min Pyeongtaek-si Gyeonggi-do 459-090 (KR) (74) Representative: Novagraaf Technologies  122 rue Edouard Vaillant 92593 Levallois-Perret Cedex 92593 Levallois-Perret Cedex (FR)