(19)
(11) EP 2 579 271 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
22.05.2019 Bulletin 2019/21

(45) Mention of the grant of the patent:
11.04.2018 Bulletin 2018/15

(21) Application number: 12190694.5

(22) Date of filing: 07.09.2004
(51) International Patent Classification (IPC): 
G21K 5/10(2006.01)
H01J 37/28(2006.01)
H01J 37/317(2006.01)
H01J 37/14(2006.01)
 G01N 23/00(2006.01)
H01J 37/09(2006.01)
H01J 37/04(2006.01)
H01J 37/10(2006.01)

(54)

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

Optische Partikelsysteme und Anordnungen und optische Partikelkomponenten für solche Systeme und Anordnungen

Systemes et dispositifs d'optique particulaire et composants d'optique particulaire pour de tels systemes et dispositifs

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

(30) Priority: 05.09.2003 US 500256 P

(43) Date of publication of application:
10.04.2013 Bulletin 2013/15

(62) Application number of the earlier application in accordance with Art. 76 EPC:
04783363.7 / 1668662

(73) Proprietors:
  • Carl Zeiss Microscopy GmbH
    07745 Jena (DE)
  • Applied Materials Israel, Ltd.
    76705 Rehovot (IL)

(72) Inventors:
  • Knippelmeyer, Rainer
    82211 Herrsching am Ammersee (DE)
  • Kienzle, Oliver
    07745 Jena (DE)
  • Kemen, Thomas
    49716 Meppen (DE)
  • Müller, Heiko
    69115 Heidelberg (DE)
  • Uhlemann, Stephan
    69115 Heidelberg (DE)
  • Haider, Maximilian
    69251 Gaiberg (DE)
  • Casares, Antonio
    73433 Aalen (DE)
  • Rogers, Steven
    76880 D.N. Emek Sorek (IL)

(74) Representative: Diehl & Partner GbR 
Patentanwälte Erika-Mann-Strasse 9
80636 München
80636 München (DE)


(56) References cited: : 
EP-A2- 0 794 552
US-A1- 2001 032 939
 US-A- 5 012 105
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).