(19)
(11) EP 2 584 593 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
25.09.2019 Bulletin 2019/39

(45) Mention of the grant of the patent:
08.05.2019 Bulletin 2019/19

(21) Application number: 11795255.6

(22) Date of filing: 10.08.2011
(51) International Patent Classification (IPC): 
H01L 21/318(2006.01)
C23C 18/14(2006.01)
 C23C 18/12(2006.01)
(86) International application number:
PCT/IB2011/001839
(87) International publication number:
WO 2011/158119 (22.12.2011 Gazette 2011/51)

(54)

FORMATION METHOD FOR SILICON OXYNITRIDE FILM

VERFAHREN ZUR BILDUNG EINES SILICIUMOXYNITRIDFILMS

PROCÉDÉ DE FABRICATION D'UN FILM D'OXYNITRURE DE SILICIUM

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 17.06.2010 JP 2010138102

(43) Date of publication of application:
24.04.2013 Bulletin 2013/17

(73) Proprietor: Merck Patent GmbH
64293 Darmstadt (DE)

(72) Inventors:
  • SHINDE, Ninad
    Kakegawa-shi Shizuoka 437-1412 (JP)
  • NAGAHARA, Tatsuro
    Kakegawa-shi Shizuoka 437-1412 (JP)
  • TAKANO, Yusuke
    Tokyo 176-0004 (JP)

(74) Representative: Regimbeau 
20, rue de Chazelles
75847 Paris Cedex 17
75847 Paris Cedex 17 (FR)


(56) References cited: : 
JP-A- 2002 270 690
JP-A- 2010 080 709
US-A- 5 770 260
 JP-A- 2006 261 616
JP-A- 2010 080 709
US-A1- 2008 305 611
   
     
    Remarks:
     
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).