(19)
(11) EP 2 585 800 A1

(12)

(43) Date of publication:
01.05.2013 Bulletin 2013/18

(21) Application number: 11798990.5

(22) Date of filing: 24.06.2011
(51) International Patent Classification (IPC): 
G01H 13/00(2006.01)
(86) International application number:
PCT/US2011/041813
(87) International publication number:
WO 2011/163584 (29.12.2011 Gazette 2011/52)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 24.06.2010 US 358160 P

(71) Applicant: Tangidyne Corporation
Greenville, SC 29609 (US)

(72) Inventor:
  • GRIMSHAW, Scott, F.
    Greenville SC 29609 (US)

(74) Representative: Gemmell, Peter Alan et al
Dummett Copp LLP 25 The Square
Martlesham Heath Ipswich IP5 3SL
Martlesham Heath Ipswich IP5 3SL (GB)

   


(54) SELF-CLEANING FILM THICKNESS MEASURING APPARATUS, AND METHOD OF CLEANING FILM THICKNESS MEASURING APPARATUS