| (84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
| (30) |
Priority: |
28.06.2010 US 359239 P
|
| (71) |
Applicant: Entegris, Inc. |
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Billerica, MA 01821-4600 (US) |
|
| (72) |
Inventors: |
|
- CEDRONE, James
Braintree, MA 02184 (US)
- GASHGAEE, Iraj
Marlborough, MA 01752 (US)
- MAGOON, Paul, J.
Merrimack, NH 03054 (US)
- BRAGGIN, Jennifer, M.
Somerville, MA 02143 (US)
- GONNELLA, George, L.
Pepperell, MA 01463 (US)
- VAIL, Johnathan, Owen
Nashua, NH 03064 (US)
|
| (74) |
Representative: Betten & Resch |
|
Theatinerstrasse 8
80333 München
80333 München (DE) |
|
