(19)

(11)

EP 2 588 407 A1

(12)

(43) Date of publication: 08.05.2013 Bulletin 2013/19 (21) Application number: 11733611.5 (22) Date of filing: 30.06.2011

(51) International Patent Classification (IPC):  C01B 19/00(2006.01) H01L 31/032(2006.01) (86) International application number: PCT/EP2011/060996 (87) International publication number: WO 2012/001094 (05.01.2012 Gazette 2012/01)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 08.07.2010 US 344374 P 02.07.2010 EP 10006875 (71) Applicant: Umicore 1000 Brussels (BE)	(72) Inventor: AMINIAN, Hossein Ottawa, Ontario K4A 4Z1 (CA) (74) Representative: Pilate, André  Umicore Research Patent Department Kasteelstraat 7 B-2250 Olen B-2250 Olen (BE)