(19)
(11) EP 2 592 661 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
22.05.2019 Bulletin 2019/21

(45) Mention of the grant of the patent:
20.03.2019 Bulletin 2019/12

(21) Application number: 11188873.1

(22) Date of filing: 11.11.2011
(51) International Patent Classification (IPC): 
H01L 31/107(2006.01)
H01L 31/18(2006.01)
 H01L 31/0352(2006.01)
H01L 27/146(2006.01)

(54)

Lateral avalanche photodiode device and method of production

Laterale Lawinenphotodiode und deren Herstellungsverfahren

Photodiode latérale à avalanche et son procédé de fabrication

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(43) Date of publication of application:
15.05.2013 Bulletin 2013/20

(73) Proprietor: ams AG
8141 Premstätten (AT)

(72) Inventors:
  • Jonak-Auer, Ingrid
    8043 Graz (AT)
  • Teva, Jordi
    5509 MX Veldhoven (NL)

(74) Representative: Epping - Hermann - Fischer 
Patentanwaltsgesellschaft mbH Schloßschmidstraße 5
80639 München
80639 München (DE)


(56) References cited: : 
EP-A1- 2 256 810
DE-A1- 19 621 965
US-B1- 6 707 075
 WO-A2-02/29903
US-A- 3 886 579
   
  • CHUNG M H ET AL: "LATERAL SI AVALANCHE PHOTODIODE FABRICATED OVER AN ETCHED INTERDIGITAL MESA", ELECTRONICS LETTERS, IEE STEVENAGE, GB, vol. 26, no. 23, 8 November 1990 (1990-11-08), pages 1946-1947, XP000174276, ISSN: 0013-5194
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).