(19)
(11) EP 2 598 286 A2

(12)

(88) Date of publication A3:
22.03.2012

(43) Date of publication:
05.06.2013 Bulletin 2013/23

(21) Application number: 11760557.6

(22) Date of filing: 22.07.2011
(51) International Patent Classification (IPC): 
B24B 9/06(2006.01)
B24D 5/14(2006.01)
(86) International application number:
PCT/IB2011/053282
(87) International publication number:
WO 2012/014137 (02.02.2012 Gazette 2012/05)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 30.07.2010 US 847015

(71) Applicant: MEMC Electronic Materials, Inc.
St. Peters, MO 63376 (US)

(72) Inventors:
  • ZHANG, Guoqiang, David
    St. Peters, Missouri 63376 (US)
  • VANDAMME, Roland
    St. Peters, Missouri 63376 (US)
  • ALBRECHT, Peter, D.
    St. Peters, Missouri 63376 (US)

(74) Representative: Maiwald Patentanwalts GmbH 
Elisenhof Elisenstraße 3
80335 München
80335 München (DE)

   


(54) GRINDING TOOL FOR TRAPEZOID GRINDING OF A WAFER