(19)

(11)

EP 2 599 119 A1

(12)

(43) Date of publication: 05.06.2013 Bulletin 2013/23 (21) Application number: 11754462.7 (22) Date of filing: 27.07.2011

(51) International Patent Classification (IPC):  H01L 23/544(2006.01) G01L 5/00(2006.01) G01D 3/036(2006.01) H03K 3/011(2006.01) (86) International application number: PCT/GB2011/051434 (87) International publication number: WO 2012/013977 (02.02.2012 Gazette 2012/05)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 28.07.2010 GB 201012656 (71) Applicant: EoSemi Limited Congleton Cheshire CW12 4SN (GB)	(72) Inventors: HARROLD, Stephen John Altrincham WA14 5SE (GB) BRATT, Adrian Harvey Cheshire CW3 9ST (GB) GOLDFINCH, Jonathan Lasselet Derbyshire SK23 7HC (GB) (74) Representative: Lambert, Ian Robert et al Wynne-Jones, Lainé & James LLP Essex Place 22 Rodney Road Cheltenham Gloucestershire GL50 1JJ Cheltenham Gloucestershire GL50 1JJ (GB)