(19)
(11) EP 2 603 975 A1

(12)

(43) Date of publication:
19.06.2013 Bulletin 2013/25

(21) Application number: 11816146.2

(22) Date of filing: 11.08.2011
(51) International Patent Classification (IPC): 
H03H 3/007(2006.01)
H03H 9/02(2006.01)
 H03H 9/24(2006.01)
(86) International application number:
PCT/FI2011/050711
(87) International publication number:
WO 2012/020173 (16.02.2012 Gazette 2012/07)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 13.08.2010 FI 20105849

(71) Applicant: Teknologian tutkimuskeskus VTT
02150 Espoo (FI)

(72) Inventors:
  • JAAKKOLA, Antti
    FI-02044 Vtt (FI)
  • PENSALA, Tuomas
    FI-02044 Vtt (FI)
  • KIIHAMÄKI, Jyrki
    FI-02044 Vtt (FI)

(74) Representative: Tiilikainen, Jarkko Tapio 
Seppo Laine Oy Itämerenkatu 3 B
00180 Helsinki
00180 Helsinki (FI)

   


(54) MICROMECHANICAL RESONATOR ARRAY AND METHOD FOR MANUFACTURING THEREOF