(19)
(11) EP 2 609 317 A1

(12)

(43) Date of publication:
03.07.2013 Bulletin 2013/27

(21) Application number: 10752307.8

(22) Date of filing: 27.08.2010
(51) International Patent Classification (IPC): 
F02G 1/043(2006.01)
H01L 37/02(2006.01)
(86) International application number:
PCT/EP2010/005279
(87) International publication number:
WO 2012/025137 (01.03.2012 Gazette 2012/09)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

(71) Applicant: Albert-Ludwigs-Universität Freiburg
79085 Freiburg (DE)

(72) Inventors:
  • WOIAS, Peter
    79102 Freiburg (DE)
  • HUESGEN, Till
    79713 Bad Säckingen (DE)
  • KARANILAM THUNDIPARAMBU RAVINDRAN, Shankar
    79110 Freiburg (DE)

(74) Representative: Grünecker, Kinkeldey, Stockmair & Schwanhäusser 
Leopoldstrasse 4
80802 München
80802 München (DE)

   


(54) MICROMECHANICAL PYROELECTRIC GENERATOR