(19)
(11) EP 2 610 888 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
17.12.2014 Bulletin 2014/51

(43) Date of publication A2:
03.07.2013 Bulletin 2013/27

(21) Application number: 13001553.0

(22) Date of filing: 14.06.2010
(51) International Patent Classification (IPC): 
H01J 37/08(2006.01)
F25D 3/12(2006.01)
 H01J 37/02(2006.01)
H01J 37/28(2006.01)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

(30) Priority: 18.06.2009 US 218282 P

(62) Application number of the earlier application in accordance with Art. 76 EPC:
10742622.3 / 2443644

(71) Applicant: Carl Zeiss Microscopy, LLC
Thornwood, NY 10594 (US)

(72) Inventors:
  • McVey, Shawn
    Newton, NH 03858 (US)
  • Dimanna, Mark
    Newton, NH 03858 (US)
  • Bassett, Brian
    South Hampton, NH 03827 (US)
  • Comunale, Richard
    Ipswich, MA 01938 (US)
  • Barriss, Louise
    North Reading, MA 01864 (US)
  • Sanford, A. Colin
    Atkinson, New Hampshire 03811 (US)
  • Notte, A. John
    Gloucester, MA 01930-5113 (US)
  • Groholski, Alexander
    Salem, MA 01970 (US)

(74) Representative: Carl Zeiss AG - Patentabteilung 
Carl-Zeiss-Strasse 22
73447 Oberkochen
73447 Oberkochen (DE)

   


(54) Cooled charged particle systems and methods


(57) Cooled charged particle sources and methods are disclosed. In some embodiments, a charged particle source is thermally coupled to a solid cryogen, such as solid nitrogen. The thermal coupling can be design to provide good thermal conductivity to maintain the charged particle source at a desirably low temperature.







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