(19)
(11) EP 2 612 351 A1

(12)

(43) Date of publication:
10.07.2013 Bulletin 2013/28

(21) Application number: 11764119.1

(22) Date of filing: 02.09.2011
(51) International Patent Classification (IPC): 
H01L 21/67(2006.01)
(86) International application number:
PCT/EP2011/065168
(87) International publication number:
WO 2012/028704 (08.03.2012 Gazette 2012/10)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 03.09.2010 US 379876 P

(71) Applicant: Oerlikon Solar AG, Trübbach
9477 Trübbach (CH)

(72) Inventors:
  • DESPONT, Laurent
    CH-1470 Estavayer-le-Lac (CH)
  • POPPELLER, Markus
    A-6800 Feldkirch (AT)
  • SCHMOLL, Ralph
    A-6832 Röthis (AT)

(74) Representative: Michalski Hüttermann & Partner Patentanwälte 
Hafenspitze Speditionstrasse 21
40221 Düsseldorf
40221 Düsseldorf (DE)

   


(54) SUBSTRATE HEATING DEVICE