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EP 2 616 462 A1

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(43) Date of publication: 24.07.2013 Bulletin 2013/30 (21) Application number: 11825442.4 (22) Date of filing: 16.09.2011

(51) International Patent Classification (IPC):  C07D 403/04(2006.01) C09K 11/06(2006.01) C07D 409/14(2006.01) H01L 27/32(2006.01) C07D 405/14(2006.01) C07D 403/14(2006.01) H01L 51/54(2006.01) (86) International application number: PCT/KR2011/006810 (87) International publication number: WO 2012/036482 (22.03.2012 Gazette 2012/12)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 14.09.2011 KR 20110092422 17.09.2010 KR 20100091545 (71) Applicant: Rohm And Haas Electronic Materials Korea Ltd. Cheonan-si, Chungcheongnam-do 331-980 (KR)

(72) Inventors: SHIN, Hyo Nim Seongnam-si Gyeonggi-do 463-892 (KR) HWANG, Soo-Jin Seoul 136-770 (KR) KIM, Hee Sook Suwon-si Gyeonggi-do 443-390 (KR) YOON, Seok Keun Suwon-si Gyeonggi-do 443-390 (KR) LEE, Mi Ja Hwaseong-si Gyeonggi-do 445-360 (KR) KIM, Nam Kyun Yongin-si Gyeonggi-do 448-130 (KR) CHO, Young Jun Seongnam-si Gyeonggi-do 463-892 (KR) KWON, Hyuck Joo Seoul 135-877 (KR) LEE, Kyung Joo Seoul 121-773 (KR) KIM, Bong Ok Seoul 135-877 (KR) (74) Representative: Buckley, Guy Julian  Patent Outsourcing Limited 1 King Street Bakewell Derbyshire DE45 1DZ Bakewell Derbyshire DE45 1DZ (GB)