(19)
(11) EP 2 616 771 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
19.12.2018 Bulletin 2018/51

(45) Mention of the grant of the patent:
31.10.2018 Bulletin 2018/44

(21) Application number: 11826069.4

(22) Date of filing: 18.09.2011
(51) International Patent Classification (IPC): 
G01C 19/56(2012.01)
G01P 15/125(2006.01)
 G01P 15/18(2013.01)
(86) International application number:
PCT/US2011/052061
(87) International publication number:
WO 2012/037538 (22.03.2012 Gazette 2012/12)

(54)

MICROMACHINED MONOLITHIC 6-AXIS INERTIAL SENSOR

MIKROVERARBEITETER MONOLITHISCHER INERTIALSENSOR MIT SECHS ACHSEN

CAPTEUR INERTIEL MONOLITHIQUE 6 AXES MICRO-USINÉ

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 18.09.2010 US 384240 P

(43) Date of publication of application:
24.07.2013 Bulletin 2013/30

(73) Proprietor: Fairchild Semiconductor Corporation
Phoenix, AZ 85008 (US)

(72) Inventor:
  • ACAR, Cenk
    Irvine, California 92612 (US)

(74) Representative: Schmidt, Steffen 
Wuesthoff & Wuesthoff Patentanwälte PartG mbB Schweigerstrasse 2
81541 München
81541 München (DE)


(56) References cited: : 
WO-A1-2008/059757
JP-A- 2010 025 898
US-A1- 2009 064 780
US-B2- 6 725 719
 JP-A- 2007 024 864
US-A1- 2009 064 780
US-A1- 2009 114 016
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).