METHOD FOR CONTINUOUSLY PRODUCING FLEXIBLE COPPER CLAD LAMINATES

Description

TECHNICAL FIELD

[0001] The present invention relates to a process for the production of flexible copper-clad laminate, especially a process for the continuous production of two-layer-type flexible copper-clad laminate.

Background art

[0002] FCCL (Flexible Copper Clad Laminate) is a copper-clad laminate having a better flexural property formed by bonding a single side or double sides of a flexible insulating material such as polyester films (PET) or polyimide films (PI) to copper foil having a certain thickness by a certain technological treatment. FCCL comprises 3L-FCCL containing adhesives and 2L-FCCL containing no adhesives. As compared with 3L-FCCL, 2L-FCCL has better performances in, such as thermal resistance, size, stability, ageing resistance, reliability and the like because of containing no epoxy adhesives or acrylate adhesives, so as to achieve rapid development.

[0003] At presence, there are mainly three processes for preparing 2L-FCCL, i.e. (1) Coating (Casting), (2) Lamination, and (3) Sputtering/Plating, having their own peculiarities.

1. Casting:

[0004] The early casting process comprising single-side coating a prepolymer (polyamic acid, PAA) of PI onto the surface of copper foil, drying to remove the solvent and high temperature imidizing. Such process has relatively simple procedures and is easy to carry out, but the product has a worse bonding property between the copper layer and PI and a worse size stability.

[0005] In recent years, a multilayer coating process is developed in the industry, comprising coating (casting) on the surface of the copper foil a layer of thermoplastic PI (TPI) resin, and then a layer of PI (low CTE-PI) resin having a low thermal expansion coefficient, finally a layer of thermoplastic PI(TPI) resin, high temperature imidizing and laminating with the copper foil to form a product.

[0006] The multilayer coating (casting) process may achieve the effects at two aspects, i.e. (1) having good consistency between the bonding property and size stability of the product; and (2) maintaining the symmetry of the whole structure and reducing the curling of the product.

[0007] There are a few flaws with the multilayer coating (casting) process, such as complex procedures, higher device investment coast, and the like. Due to the technical problems during the preparation of thin copper foil, such process is difficult to be used for producing 2L-FCCL having a copper foil thickness of 18 µm or less. Such process is mainly used for producing single sided laminates.

[0008] 2. Lamination is one technological process which has been rapidly development in recent years, comprising double-side or single-side coating a prepolymer (polyamic acid, PAA) of a thermoplastic PI resin having excellent bonding properties on the basis of PI (CTE-PI) film having a low expansion coefficient, drying and imidizing to form a composite film, re-melting the thermoplastic resin at high temperature and high pressure, laminating with copper foils to form a single-sided or double-sided product.

[0009] Currently, the basement membrane providers provide such composite films consisting of PI films having a high size stability and a layer of thermoplastic PI resin (TPI) coated on the PI films. FCCL manufacturers can directly hot-press the composite films and copper foils into laminates.

[0010] Lamination is characterized in (1) relatively simple production procedures, a higher cost than the coating process; (2) being adapted to the product model of small batch and various variety; (3) being useful for production of single sided and double sided products; and (4) the product having the comprehensive performances of excellent bonding properties and size stability.

[0011] Due to the technical problems during the preparation of thin copper foil, such process is also difficult to be used for producing 2L-FCCL having a copper foil thickness of 18 µm or less.

3. Sputtering/Plating

[0012] In vacuum environment, the ionized argon ion (Ar⁺) is used to bombard the target (copper) surface, so that atoms (copper atoms) on the target are "sputtered" (there will be spray sputtering if stones are thrown into water). The sputtered copper atoms are adsorbed and deposited onto the surface of the substrate PI films to form a thin copper layer, and then the copper layer is thickened by electroplating to the required thickness.

[0013] By such process, various single sided or double sided 2L-FCCLs having a thickness of 5-12 µm will be readily produced, but the peeling strength of copper foils is greatly lower than 2L-FCCLs produced by the coating process and lamination process.

[0014] EP 1 514 957 A1 relates to a process for manufacturing a plated film comprising magnetron sputtering and electrocoppering. This process namely implements a glow discharge plasma of argon gas for pretreating the film surface and not for depositing metal thereon.

[0015] Among said three processes, 2L-FCCLs produced by the coating and lamination processes have a better bonding force between copper foils and PI matrix, i.e. a high peeling strength, but have a higher cost due to complex production processes and high requirements on the devices. Furthermore, since the formed copper foils (rolled copper foil and electrodeposited copper foil) shall be used, rolled copper foil and electrodeposited copper foil are difficult to have a thickness less than 19 µm, such as 12 µm, 9 µm, 7 µm and the like due to the technological limitations. Thus the application thereof in high-grade precision electronic products based on HDI (high density internet base plate) and COF (Chip on Flex), such as liquid crystal (plasma) displays, liquid crystal (plasma) televisions and the like, is limited.

[0016] On the contrary, the sputtering/plating can be used to readily produce 2L-FCCLs of various ultrathin copper foils (such as 12 µm, 9 µm, or even 7 µm and 5 µm) with a lower cost. However, because of limitation of the sputtering technologies, the bonding force between the metal copper foils and PI films (peeling strength) is far lower than the bonding force between the metal layer and films in 2L-FCCLs produced by the coating and lamination processes, so as to affect the generalization and application thereof. For example, FCCLs produced by the lamination and coating processes have a peeling strength of greater than or equal to 0.6 N/mm, while those produced by the sputtering/plating (spraying plating method) have a peeling strength of about 0.35 N/mm. Thus there really needs a novel process for producing 2L-FCCLs in the art so as to meet the requirements on the development of the industry of flexible printed circuit board (FPC).

Contents of the invention

[0017] In order to overcome the technical defects in the prior art, the present invention provides 2L-FCCL capable of continuous production of ultrathin copper foils, wherein the bonding force (peeling strength) between copper foils of such FCCL and the PI films is higher and achieves the level equivalent to the coating process and lamination process.

[0018] The prevent invention provides a process for the continuous production of flexible copper-clad laminate, characterized in comprising the sequent steps of:

conducting a continuous ion implantation to a surface of an organic macromolecular polymer film;

conducting a plasma deposition on the ion implanted surface of the organic macromolecular polymer film; and

continuously electrocoppering the plasma deposited surface of the organic macromolecular polymer film,

wherein said ion implantation is conducted under the conditions of a running speed of said organic macromolecular polymer film of 0.3-2 m/minute, an ion implantation voltage of 1-10 KV, an ion implantation dosage of 0.5x10¹³-1.0x10¹⁷ atom/cm²; said plasma deposition is conducted under the conditions of a plasma deposition voltage of 100-500 V and an ion beam stream of 20-80 milliampere,

wherein said continuous ion implantation and plasma deposition are carried out in an equipment comprising an ion source and a vacuum chamber; the vacuum chamber comprises on the walls a vacuum orifice and at least one opening connecting with said ion source; the vacuum chamber comprises a unreeling roller, a tension adjusting unit, a cooling part, and a wind up roller; said cooling part is placed between said unreeling roller and wind up roller; said tension adjusting unit is displaced at both sides of the cooling part and between said unreeling roller and wind up roller; said cooling part consists of at least one hollow cooling roller free to rotate and in which the cooling medium passes; said cooling roller, unreeling roller and wind up roller are parallel to each other, and the cooling roller is axially perpendicular to the direction along which said plasma is fed into the vacuum chamber.

[0019] The bonding force (peeling strength) between the copper films and the substrate in 2L-FCCLs produced by the processes of the present invention is far greater than the bonding force between the copper films and the substrate in FCCLs produced by the sputtering/plating processes, and is equivalent to the bonding force between the copper films and the substrate in FCCLs produced by the coating and lamination processes. Moreover, the thickness of the copper films may be readily controlled to be less than 18 µm, i.e. 12 µm, 9 µm, or even 7 µm and 5 µm. Upon detection, FCCLs produced by the process of the present invention has a peeling strength of higher than 0.6 N/mm, the highest reaching 0.83 N/mm. More important, the process of the present invention is the process for the continuous production of 2L-FCCLs, and can operate not only one side of the film substrate, but also two sides of the film substrate at the same time. That is to say, the present process can be used for producing not only 2L-single-sided FCCLs, but also 2L-double-sided FCCLs, so as to have a very high yield.

Description of the drawings

[0020] 

Fig.1 shows the schematic diagram of magnetic filter vacuum arc ion source.

Fig.2 shows the schematic diagram of the vacuum chamber of an ion implantation and plasma deposition equipment used by the processes of the invention.

Fig.3 shows the schematic diagram of a continuous electroplating equipment used by the processes of the invention.

Fig.4 shows the magnified schematic diagram of the continuous electroplating equipment as shown in Fig.3.

Embodiments

[0021] The prevent invention provides a process for the continuous production of flexible copper-clad laminate, characterized in comprising the sequent steps of:

conducting a continuous ion implantation to a surface of an organic macromolecular polymer film;

conducting a plasma deposition on the ion implanted surface of the organic macromolecular polymer film; and

continuously electrocoppering the plasma deposited surface of the organic macromolecular polymer film,

wherein said ion implantation is conducted under the conditions of a running speed of said organic macromolecular polymer film of 0.3-2 m/minute, an ion implantation voltage of 1-10 KV, an ion implantation dosage of 0.5x10¹³-1.0x10¹⁷ atom/cm²; said plasma deposition is conducted under the conditions of a plasma deposition voltage of 100-500 V and an ion beam stream of 20-80 milliampere,
wherein said continuous ion implantation and plasma deposition are carried out in an equipment comprising an ion source and a vacuum chamber; the vacuum chamber comprises on the walls a vacuum orifice and at least one opening connecting with said ion source; the vacuum chamber comprises a unreeling roller, a tension adjusting unit, a cooling part, and a wind up roller; said cooling part is placed between said unreeling roller and wind up roller; said tension adjusting unit is displaced at both sides of the cooling part and between said unreeling roller and wind up roller; said cooling part consists of at least one hollow cooling roller free to rotate and in which the cooling medium passes; said cooling roller, unreeling roller and wind up roller are parallel to each other, and the cooling roller is axially perpendicular to the direction along which said plasma is fed into the vacuum chamber.

[0022] In other embodiments, the direction of said plasma along which said plasma is fed into the vacuum chamber and the axial direction of said cooling roller both are horizontal; said cooling roller horizontally corresponds to said openings; or said plasma is fed into the vacuum chamber in the horizontal direction; said roller is axially in the upright direction; said openings and said cooling roller correspond to each other in the left and right directions or in the front and rear directions; or said plasma is fed into the vacuum chamber in the vertical direction, and said cooling roller is correspondingly placed right below or right above said openings.

[0023] Since the cooling components are used, the damage of films by a substantial amount of heat produced by plasma deposition and ion implantation for a long period of time can be prevented. The materials composing said cooling rollers may be those having a better thermal conductivity, e.g. metals, preferably stainless steel. The shapes of the cooling rollers are not particularly defined, preferably cylindrical shape. Gases or liquids, even solids (e.g. dry ice) may be fed into the hollow part of the cooling roller to cool the films, wherein the cooling medium is preferably liquids having a better thermal conductivity, e.g. cooling oil or water. In consideration of cost, the cooling medium is preferably water which is at room temperature, preferably at a temperature of 0-10°C so as to provide excellent cooling effect.

[0024] The materials of the unreeling rollers and the wind up rollers are not particularly defined, and they may be made of woods, plastics and metals, preferably metals, most preferably stainless steel. Their shapes are not particularly defined, and they may be in a square or cylindrical shape, preferably in a cylindrical shape. When said unreeling rollers and wind up rollers are in a cylindrical shape, a cylindrical shape may be topically formed, or a cylindrical jacket may be covered so as to be convenient for rotation. The size of said unreeling rollers and wind up rollers may be adjusted according to the material properties and the load as required.

[0025] A tension adjusting unit is set up in the vacuum chamber to ensure a full expansion of the films, so as to be advantageous to forming a homogeneous metal layer on the films.

[0026] When the plasma deposition and ion implantation are conducted for the films, the films are disposed on the unreeling rollers, and one end of the films passes through the tension adjusting unit, cooling component, tension adjusting unit in turn and finally is fixed onto said wind up rollers. The unreeling rollers and wind up rollers are rotated to adjust the running speed of the films. Ion sources are turned on to make the plasma pass through the openings of the walls of the vacuum chamber, so as to conduct the continuous plasma deposition and ion implantation. The rotation of said unreeling rollers and wind up rollers can be conducted manually or by mechanical control. For example, one end of said unreeling rollers and wind up rollers is expanded outside the vacuum chamber, and said unreeling rollers and wind up rollers are rotated manually; or said unreeling rollers and wind up rollers are connected with the electric machine to adjust the running speed of the films by turning on the electric machine.

[0027] Preferably, said equipment further comprises the electric machines connected with said unreeling roller and wind up roller, and the part for accelerating the plasma beam stream emitted from the ion source. Said part is disposed between said plasma source and said vacuum chamber, and comprises a power supply and a controlling unit which may be any suitable controlling unit in the art, e.g. an adjusting unit to adjusting the accelerating voltage.

[0028] The vacuum chamber of the equipment is preferably equipped with the brackets, and said electric machines, said unreeling roller, said tension adjusting unit, said wind up roller and said cooling part all are disposed on said brackets.

[0029] The ion sources used by said equipment are not specially limited, and can be any ion source in the art, preferably metal vapor vacuum arc ion source or magnetic filter vacuum arc ion source.

[0030] Preferably, said equipment further comprises the electric machines which are connected with the unreeling roller and wind up roller. The electric machines may be disposed inside or outside the vacuum chamber, preferably outside the vacuum chamber. There may be one or more electric machines, preferably more electric machines. When there are more electric machines, and while conducting the plasma deposition and ion implantation to the films, the rotating speeds of these electric machines are adjusted to match the numbers of revolution of the unreeling roller and wind up roller and to operate the tension adjusting unit to prevent the films from forming frillings or accumulation between the unreeling roller and wind up roller.

[0031] In another preferred embodiment, based on the functions implemented by the equipment provided by the present invention, there are more openings, preferably 2-10 openings, so as to be convenient for the continuous ion implantation and plasma deposition of the equipment. When there are more openings, a valve is preferably disposed between the openings and said ion source, so as to close or open the channel between said openings and said ion source, so as to rapidly change the cathode while maintaining the vacuum degree of the vacuum chamber. Said openings may be disposed on the same side of said vacuum chamber, or at different sides of said vacuum chamber, preferably at two opposite sides. The openings disposed at different sides may be equally distributed and homogeneously arranged, or unequally distributed and unevenly arranged. When the ion implantation and plasma deposition need to be conducted simultaneously in the equipment provided by the present invention, a part of said openings are used to pass the plasma beam for ion implantation, and the other part of said openings are used to the plasma beam for plasma deposition. When the openings are disposed at two opposite sides of the equipment provided by the present invention, the plasma deposition and ion deposition of two sides of the films can be readily achieved. If the openings are disposed at two opposite sides of the equipment provided by the present invention, and the single-sided plasma deposition and ion implantation of the films need to be conducted, only the valve needs to be adjusted to close the openings at one side of the vacuum chamber, or the ion source at one side turns on so as to achieve the single-sided plasma deposition and ion implantation.

[0032] The cooling part of the equipment consists of many cooling rollers to as to better effect the cooling effect. In one preferred embodiment, there are 2-10 cooling rollers. In another preferred embodiment, the amount of the cooling rollers is the same as the amount of the openings, i.e. 2-10.

[0033] In another preferred embodiment, there are 6 openings, wherein three openings are respectively disposed at two opposite walls of the vacuum chamber, in order to conduct the ion implantation for the films, and then the plasma deposition. One opening on each wall may be used for ion implantation, and the other two adjacent openings on each wall may be used for plasma deposition. Moreover, two openings for ion implantation are disposed adjacent to one end of said unreeling roller; four openings for plasma deposition are disposed adjacent to one of said wind up roller.

[0034] In order to make the scope distribution of ion implantation and the thickness of plasma deposition more homogeneous, the ratio of said openings between the running direction of films and the diameter of said cooling rollers is preferably controlled within a certain scope. When said openings are in a rectangular shape, two sides of such rectangle are axially parallel to said cooling roller; the other two sides are axially perpendicular to said cooling roller. Through a large number of researches, it is found that, when the size of two sides axially perpendicular to the cooling roller is 0.3-1 times the diameter of the cooling roller, the scope of ion implantation onto the films or the thickness of plasma deposition onto the films is more homogeneous, so as to achieve a more homogeneous adhesive force between the CCLs deposited on the films and the films. In another preferred embodiment, said opening is rectangular. Two sides of such rectangle is axially parallel to the cooling roller; the other two sides are axially perpendicular to the cooling roller, wherein the size of two sides axially perpendicular to the cooling roller is 0.3-1, preferably 0.5-0.8 times the diameter of the cooling roller.

[0035] The inventor of the present invention finds that, in order to achieve better ion implantation and plasma deposition, the ratio of the distance between said openings and the axial line of the corresponding cooling roller to the diameter of said cooling roller is preferably controlled within a certain scope. Through a large number of studies, it is found that, when the distance between said openings and the axial line of the corresponding cooling roller is 0.5-3, particularly 1-2.5 times the diameter of said cooling roller, there is a higher efficiency of ion implantation and plasma deposition. In one preferred embodiment, the distance between said openings and the axial line of the corresponding cooling roller is 0.5-3, most preferably 1-2.5 times the diameter of said cooling roller.

[0036] The inventor of the present invention finds that, in order to prevent mutual interference of ion beams fed into the vacuum chamber through different openings and to avoid cracking of CCLs deposited on the films due to over stressing, the distance between two adjacent openings on the same wall is preferably controlled within a certain scope. Through a large number of studies, it is found that, when the distance between two adjacent openings on the same wall is 0.75-4 times the diameter of the cooling roller, interference is not easy to occur in the ion beams fed into the vacuum chamber through different openings, and cracking is not easy to occur on CCLs deposited on the films. In another preferred embodiment, the distance between two adjacent openings on the same wall is 0.75-4, more preferably 1-3 times the diameter of the cooling roller.

[0037] In another preferred embodiment, according to the current film size, two sides of the openings axially vertical to the cooling rollers have a size of 30-100 mm; the cooling rollers have a diameter of 50-100 mm; the distance between said openings and the corresponding cooling roller axial line is 50-150 mm; the distance between two adjacent openings on the same wall is 75-200 mm.

[0038] In order to increase the bonding force between the CCLs coated on the substrate films and the films, the inventor conducts much comparison studies on the "ion implantation" technology and "magnetron sputtering" technology. The inventor deems that, when the "magnetron sputtering" technology is used to form CCLs on the substrate films, the operating principle thereof is as follows. In vacuum environment, the ionized argon ion (Ar⁺) is used to bombard the target (copper) surface, so that atoms (copper atoms) on the target are "sputtered" (e.g. there will be spray sputtering if stones are thrown into water). The sputtered copper atoms are adsorbed and deposited onto the surface of the substrate films to form a copper clad film. In view of the technical features of the magnetron sputtering per se, copper atoms "sputtered" contain a very low energy (the highest is only several electron volts), so that they can only be adsorbed and deposited on the surface of the substrate films, to result in a lower bonding force between the resultant copper films and the substrate.

[0039] For the aforesaid reasons, the invention deems that the velocity of movement of copper atoms or copper ions to be deposited soon to the substrate films shall be necessarily increased. The inventor thus attempts to use a novel technology, i.e. applying in a groundbreaking manner the plasma deposition and ion implantation technology onto the metal film deposition layer on the films, so as to make 2L-FCCLs.

[0040] When the plasma deposition technology is applied, the plasma is in contact with the substrate film at a certain velocity of movement to bind thereto, which can enhance the bonding force between the metal film deposition layer deposited on the substrate film and the substrate film. In particular, when the ion implantation technology is applied, copper atoms are forcibly injected inside the substrate film, which is equivalent to placing a plurality of "foundation piles" on the substrate films. Subsequently, the "plasma deposition" process is used to deposit on the films a layer of metal film layer connected with the "foundation piles" to form a compact metal film layer having a better bonding force with the substrate, so as to further increase the bonding force between the metal film layer deposited on the substrate films and the substrate films, and to make the bonding force between the metal film layer and the substrate films be far greater than the bonding force between the metal film layer obtained by magnetron sputtering and the substrate films.

[0041] In order to further increase the adhesiveness between the deposited CCL and the substrate film, the inventor finds that, if ion implantation of the films is conducted firstly, and the plasma deposition is then carried out, the bonding force between the metal film layer deposited onto the films and the films will be greatly increased. Thus, the process of the present invention comprises firstly conducting the step of ion implantation of the organic macromolecular polymer film, and then the plasma deposition, and finally the continuous electrocoppering.

[0042] Upon studies, the inventor finds that, in order to achieve higher bonding forces without destroying the substrate films, the conditions for plasma deposition and ion implantations shall be necessarily optimized. Upon much studies, it is found that the ion implantation and plasma deposition under the following conditions achieve a higher bonding force between the copper clad layer and the film substrate in the double-sided FCCLs. Said vacuum chamber has a vacuum degree, which may be the vacuum degree in the art, of preferably 2x10^-3-5x10^-5 Pa; said organic macromolecular polymer film has a thickness of 3-150 µm, preferably 10-50 µm; said ion implantation is conducted under the conditions of a running speed of said organic macromolecular polymer film of 0.3-2 m/minute, an ion implantation voltage of 1-10 KV, preferably 5-10 kV, an ion implantation dosage of 0.5x10¹³-1.0x10¹⁷ atom/cm², preferably 0.5x10¹⁴-5.0x10¹⁶ atom/cm²; said plasma deposition is conducted under the conditions of a running speed of said organic macromolecular polymer film of 0.3-2 m/minute and an ion beam stream of 20-80 milliampere, preferably 20-70 milliampere, most preferably 20-40 milliampere. In particular, when the ion implantation and plasma deposition are conducted in the equipment having a rectangular opening, wherein the side axially perpendicular to the cooling roller has a length of 30-100 mm; the cooling roller has a diameter of 50-100 mm; the distance between said opening and the corresponding cooling roller axial line is 50-150 mm; the distance between two adjacent openings on the same wall is 75-200 mm. Under such conditions, the plasma copper clad layer ion injected and plasma deposited has a thickness of 20-200 nm, and there is a good bonding force between the copper clad layer and the substrate film.
In this way, the ion implantation has a depth of about 1.0-10 nm; the injection dosage reaches a magnitude as high as 10¹⁷ atoms/cm² (there are about 9.48x10²¹ atoms in 1 g of copper). This is equivalent to a great amount of foundation piles placed in the substrate films. Subsequently, the "plasma deposition" process is used to deposit a thin layer of copper layer on the surface thereof so as to bind the copper layer deposited on the surface of the substrate film to the "foundation piles" embedded inside the substrate films and to greatly increase the bonding force (peeling strength) between the metal film layer deposited thereon and the substrate film surface.

[0043] In another preferred embodiment, in order to further increase the bonding force between the metal film layer and the substrate film, said vacuum chamber has a vacuum degree, which may be the vacuum degree in the art, of preferably 2x10^-3-5x10^-5 Pa; said organic macromolecular polymer film has a thickness of 10-50 µm; said ion implantation is conducted under the conditions of a running speed of said organic macromolecular polymer film of 0.3-2 m/minute, an ion implantation voltage of 5-10 kV, an ion implantation dosage of 0.5x10¹⁴-5.0x10¹⁶ atom/cm²; said plasma deposition is conducted under the conditions of a running speed of said organic macromolecular polymer film of 0.3-2 m/minute and an ion beam stream of 20-40 milliampere.

[0044] In order to increase the bonding force between the metal film layer plasma deposited thereon and the substrate film surface, the inventor finds that the slight addition of a negative voltage before the ion bean is fed into the vacuum chamber increases the running speed of the ion beam, so as to achieve a better bonding force. In the present invention, the conditions for said plasma deposition further comprises a plasma deposition voltage of 100-500V, preferably 100-300V.

[0045] Said organic macromolecular polymer film may be any organic macromolecular polymer film in the art, such as polyimide (PI) films, polyphenylene oxide (PTO) films, polycarbonate (PC) films, polysulfone (PSU) films, polyethersulfone (PES)films, polyphenylene sulfide (PPS)films, polystyrene (PS) films, polyethylene (PE) films, polypropylene (PP) films, polyether imide (PEI), polytetrafluoroethylene (PTFE) films, polyether ether ketone (PEEK) films, polyamide (PA), polyethylene terephthalate (PET) films, liquid crystal polymer (LCP) films, or polyparabanic acid (PPA) films and the like. Preferably, polyimide (PI) films, polyethylene terephthalate (PET) films, liquid crystal polymer (LCP) films, or polyparabanic acid (PPA) films are suitable as the films of the FCCL dielectric materials.

[0046] In another preferred embodiment, the substance ion injected and plasma deposited is a metal which is one or more selected from the group consisting of chromium, nickel, copper, and molybdenum.

[0047] In the present invention, the continuous electroplating steps can be carried out in the current electroplating equipment capable of conducting the continuous electrocoppering, e.g. in the continuous electroplating equipment mentioned in CN101350315A, preferably in the following electroplating equipment comprising a unreeling machine, a wind up machine, at least one main electroplating bath, a first conductor roll group even-paired horizontally disposed and parallel to each other, and a rectifier; said main electroplating bath is non-horizontally equipped with a first anode group in which said even-paired are parallel to each other; each pair of anodes in said first anode group are two anodes adjacently disposed; each anode in the first anode group is connected with the anode of the rectifier; at least one first guide roller group parallel to the conductor roller in the first conductor roller group; the guide roller of the first guide roller group is disposed below the lowest level of the anode of the first anode group to guide the operation of the film in said main electroplating bath; the conductor roller of the first conductor roller group is disposed at a position above the main electroplating bath and corresponding to the anode of the first anode group; each pair of the conductor rollers in the first conductor roller group are connected with the cathode of the rectifier; each pair of the conductor rollers in the first conductor roller group are two conductor rollers adjacently disposed and used in turn for being in contact with the films fed into the main electroplating bath and the film discharged from said main electroplating bath.

[0048] In the present invention, the cathode of the rectifier is connected with each pair of the conductor rollers of the first conductor roller group, and the other end is connected with the electric machine or the external power grid. The cathode of the rectifier is connected with each pair of the conductor rollers of the first conductor roller group in the manner that the cathode of the rectifier is connected only with either of the conductor rollers in each pair of the conductor rollers, or both conductor rollers in each pair of the conductor rollers, so as to conduct the single-sided or double-sided continuous electroplating of the films. Certainly, in order to achieve the single-sided or double-sided continuous electroplating of the films, other manners can also be used. For example, when the cathode of the rectifier is connected with both conductor rollers in each pair of the conductor rollers of the first conductor roller group, the switch of the rectifier can be controlled to achieve the single-sided and double-sided electroplating, or the distance between two conductor rollers in each pair of the conductor rollers of the first conductor roller group is adjusted to make either or both of two conductor rollers in each pair of the conductor rollers being in contact with one or both surfaces of the films which pass therethrough. In addition, while electroplating two surfaces of the films, the current strength outputted from the rectifier can be controlled in order to control the thickness of the CCLs deposited on both surfaces of said films, so as to make the thicknesses of the CCLs deposited on both surfaces of said films the same or different from each other.

[0049] In the present invention, the pair amount of the conductor rollers of the first conductor roller group, the pair amount of the anodes of the first anode group, and the amount of the guide rollers of the first guide roller group may be set up according to the actual requirements. Said first conductor roller group, the anode of the first anode group and the guide rollers of the first guide roller group may be disposed in one or more said electroplating baths.

[0050] The number of rollers of the first guide roller group may be determined according to the actual requirements and the diameter size of the rollers of the first guide roller group, so as to make the guide rollers of the first guide roller group lead the operation of the films in said main electroplating bath. For example, if the rollers of the first guide roller group have a greater diameter size, one roller of the first guide roller group may be set up between the first and second pairs of anodes of the first anode group; one roller of the first guide roller group may be set up between the third and four pairs of anodes of the first anode group, and so on. If the rollers of the first guide roller group have a smaller diameter size, two rollers of the first guide roller group may be set up between the first and second pairs of anodes of the first anode group; two rollers of the first guide roller group may be set up between the third and four pairs of anodes of the first anode group, and so on.

[0051] The vertical distance between each pair of the conductor rollers in the first conductor roller group and the main electroplating bath may be fixed or adjustable. In one preferred embodiment, the vertical distance between each pair of the conductor rollers in the first conductor roller group and the main electroplating bath is adjustable, so as to adjust the vertical distance between each pair of the conductor rollers in the first conductor roller group and the main electroplating bath as required.

[0052] The distance between two adjacent conductor rollers of each pair in the first conductor roller group may be fixed or adjustable. In one preferred embodiment, the distance between two adjacent conductor rollers of each pair in the first conductor roller group is adjustable, so as to be convenient to adjusting the distance between two adjacent conductor rollers as required.

[0053] While continuously electrocoppering the films with said electroplating equipment, the film rolls are firstly placed on said unreeling machine to pass one end of the films through the interspace between the first pair of conductor rollers of the first conductor roller group in order, then through the interspace between the first pair of anodes of the first anode group, through the guide rollers of the first guide roller group, through the interspace between the second pair of anodes of the first anode group...finally wrapped on said wind up machine. Alternatively, the film rolls are firstly placed on said unreeling machine to make one end of the films enter the main electroplating bath, pass through the guide rollers of the first guide roller group, then through the interspace between the first pair of anodes of the first anode group, through the first pair of the guide rollers of the first guide roller group, through the guide rollers of the first guide roller group, through the interspace between the second pair of anodes of the first anode group...finally wrapped on said wind up machine. Said unreeling machine and wind up machine are driven manually or by mechanical force to rotate to make the films continuously proceed forward. Preferably, said unreeling machine and wind up machine are respectively connected with the electric machines to make said unreeling machine and wind up machine rotate at substantially the same speed by adjusting the rotating speed of the electric machines.

[0054] In one preferred embodiment, each lateral surface of each of two conductor rollers of each pair of conductor rollers in said first conductor roller group is respectively in contact with two surfaces of the films therebetween, so as to electroplate two surfaces of the films at the same time.

[0055] In one preferred embodiment, a second guide roller group parallel to the guide rollers of the first guide roller group is disposed above the main electroplating bath. Moreover, the guide rollers in the first guide roller group and the guide rollers in the second guide roller group are alternately disposed between each two adjacent pairs of conductor rollers in said first conductor roller group, so as to be advantageous to the operation of the films. The rollers of the first guide roller group may have the same or different diameters from those of the second guide roller group. In another preferred embodiment, when said main electroplating bath has a greater size, the rollers of the first and second guide roller groups have the same great diameter; one guide roller of the first and second guide roller groups is alternately disposed between each two adjacent pairs of conductor rollers in said first conductor roller group, so as to make the equipment simpler. In another preferred embodiment, when said main electroplating bath has a less size, the rollers of the first guide roller group have a less diameter, and the second guide rollers have a greater diameter. Two first guide rollers and one second guide roller are alternately disposed between each two adjacent pairs of conductor rollers in said first conductor roller group.

[0056] In one preferred embodiment, there are two to eight main electroplating baths, so as to flexibly achieve different electroplating objects by controlling the ingredients of the plating solution in the main electroplating bath, e.g. plating different CCLs. In another preferred embodiment, there are two to eight main electroplating baths, wherein the third guide rollers are disposed between two adjacent main electroplating baths and are in parallel to the conductor rollers in the first conductor roller group. Such preferred embodiments are more advantageous to the operation of the films in different main electroplating baths.

[0057] In one preferred embodiment, there are two main electroplating baths in each of which there is one guide roller in the first guide roller group; the anode in the first anode group is vertically disposed; there are two pairs of the anodes in said first anode group and the conductor rollers in said first conductor roller group.

[0058] In one preferred embodiment, said unreeling machine and wind up machine are respectively connected with the electric machine to adjust the rotating speed of the electric machine so as to control the rotating speeds of the unreeling machine and wind up machine.

[0059] In one preferred embodiment, in order to make the films operate at a higher speed, each conductor roller of the first conductor roller groups is respectively connected with a transmission unit, such transmission unit being able to making each conductor roller of the first conductor roller groups corotating or contrarotating at the same running speed. Said transmission unit may be any one useful for the invention in the art, e.g. chains and gears, preferably an electric machine-driven turbine worm gear unit, so as to better control the running speed of the films.

[0060] The electroplating equipment of the present invention preferably further comprises at least one pre-electroplating bath and one second conductor roll group odd-paired horizontally disposed and parallel to each other; the conductor rollers in said second conductor roller group are parallel to the conductor roller in said first conductor roller group; said pre-electroplating bath is non-horizontally equipped with a second anode group in which said odd-paired are parallel to each other; each pair of anodes in said second anode group are two anodes adjacently disposed; each anode in the first anode group is connected with the anode of the rectifier; at least one second guide roller group, the guide roller of which is parallel to the conductor roller in the second conductor roller group; the second guide roller group is disposed below the lowest level of the second anode to guide the operation of the film in said pre-electroplating bath; the conductor roller of the second conductor is disposed at a position above the pre-electroplating bath and corresponding to the anode of the second anode group; each pair of the conductor rollers in the second conductor roller group are connected with the cathode of the rectifier; each pair of the conductor rollers in the second conductor roller group are two conductor rollers adjacently disposed and used in turn for being in contact with the films fed into the pre-electroplating bath and the film discharged from said pre-electroplating bath; a fourth guide roller being disposed between the pre-electroplating bath and said main electroplating bath and disposed parallel to the conductor rollers in the first conductor roller group.

[0061] The current strength in the pre-electroplating bath is not homogeneously distributed, and the current strength is gradually decreased from the uppermost to the lowest of the anode. The films are electroplated from the lower end of the first and second anodes at which the current strength is low, so that the films coated with CCLs not homogeneously distributed will not readily generate sparks to destroy the films.

[0062] In one preferred embodiment, each lateral surface of each of two conductor rollers of each pair of conductor rollers in said second conductor roller group is respectively in contact with two surfaces of the films therebetween, so as to treat two surfaces of the films at the same time.

[0063] In one preferred embodiment, in order to simplify the structure of the pre-electroplating bath, there are two guide rollers in said second guide roller group; the anode of said second anode group is a pair of anodes vertically disposed; and there is one pair of the conductor rollers in the second conductor roller group.

[0064] In one preferred embodiment, a fifth guide roller is set up above the pre-electroplating bath and in parallel to the second guide roller. Moreover, the second guide roller and said fifth guide roller are alternately disposed between each two adjacent pairs of conductor rollers in said second conductor roller group, so as to be advantageous to the operation of the films.

[0065] In one preferred embodiment, in order to make the films operate at a higher speed, each conductor roller of the first and/or second conductor roller groups is respectively connected with a transmission unit, such transmission unit being able to making each conductor roller of the first and second conductor roller groups corotating or contrarotating at the same running speed.

[0066] Said transmission unit may be any one useful for the invention in the art, e.g. chains and gears, preferably an electric machine-driven turbine worm gear unit, so as to better control the running speed of the films.

[0067] The vertical distance between each pair of the conductor rollers in the second conductor roller group and the main electroplating bath may be fixed or adjustable. In one preferred embodiment, the vertical distance between each pair of the conductor rollers in the second conductor roller group and the main electroplating bath is adjustable, so as to be convenient to adjusting the vertical distance between each pair of the conductor rollers in the second conductor roller group and the main electroplating bath as required.

[0068] The distance between two adjacent conductor rollers in the second conductor roller group may be fixed or adjustable. In one preferred embodiment, the distance between two adjacent conductor rollers in the second conductor roller group is adjustable, so as to be convenient to adjusting the distance between two adjacent conductor rollers as required.

[0069] In one preferred embodiment, a third guide roller is further set up at one side above the pre-electroplating bath and adjacent to the unreeling machine, and is parallel to the conductor rollers in the second guide roller group so as to be advantageous to the operation of films.

[0070] In one preferred embodiment, in order to wash the plating solution on the films after electroplating, such electroplating equipment further comprises a water washing bath equipped with at least one fourth guide roller, wherein a sixth guide roller is set up between said main electroplating bath and said water washing bath; said fourth guide roller and said sixth guide roller both set up in parallel to the conductor rollers in the first guide roller group.

[0071] In one preferred embodiment, in order to prevent copper oxidation, such electroplating equipment has two water washing baths, and a passivation bath between said two water washing baths, wherein at least one fifth guide roller is equipped in the passivation bath; a seventh guide roller is equipped between said water washing baths and said passivation bath; said fifth guide roller and said seven guide roller are set up in parallel to the conductor rollers in the first guide roller group.

[0072] In one preferred embodiment, in order to dry water on the CCLs as soon as possible, such electroplating equipment further comprises setting up a drying oven after the last water washing bath, a eighth guide roller between said drying oven and the water washing bath, wherein said eighth guide roller is set up in parallel to the conductor rollers in the first guide roller group.

[0073] The electroplating equipment preferably comprises said main electroplating bath and pre-electroplating bath. The electroplating equipment comprises a unreeling machine, a wind up machine, at least one main electroplating bath, a first conductor roll group even-paired horizontally disposed and parallel to each other, and a rectifier; said main electroplating bath is non-horizontally equipped with a first anode group in which said even-paired are parallel to each other; each pair of anodes in said first anode group are two anodes adjacently disposed; each anode in the first anode group is connected with the anode of the rectifier; at least one first guide roller group parallel to the conductor roller in the first conductor roller group; the guide roller of the first guide roller group is disposed below the lowest level of the anode of the first anode group to guide the operation of the film in said main electroplating bath; the conductor roller of the first conductor roller group is disposed at a position above the main electroplating bath and corresponding to the anode of the first anode group; each pair of the conductor rollers in the first conductor roller group are connected with the cathode of the rectifier; each pair of the conductor rollers in the first conductor roller group are two conductor rollers adjacently disposed and used in turn for being in contact with the films fed into the main electroplating bath and the film discharged from said main electroplating bath; said electroplating equipment further comprises at least a pre-electroplating bath and a second conductor roll group odd-paired horizontally disposed and parallel to each other; the conductor rollers in said second conductor roller group are parallel to the conductor roller in said first conductor roller group; said pre-electroplating bath is non-horizontally equipped with a second anode group in which said odd-paired are parallel to each other; each pair of anodes in said second anode group are two anodes adjacently disposed; each anode in the first anode group is connected with the anode of the rectifier; at least one second guide roller group, the guide roller of which is parallel to the conductor roller in the second conductor roller group; the second guide roller group is disposed below the lowest level of the second anode to guide the operation of the film in said pre-electroplating bath; the conductor roller of the second conductor is disposed at a position above the pre-electroplating bath and corresponding to the anode of the second anode group; each pair of the conductor rollers in the second conductor roller group are connected with the cathode of the rectifier; each pair of the conductor rollers in the second conductor roller group are two conductor rollers adjacently disposed and used in turn for being in contact with the films fed into the pre-electroplating bath and the film discharged from said pre-electroplating bath; a fourth guide roller being disposed between the pre-electroplating bath and said main electroplating bath and disposed parallel to the conductor rollers in the first conductor roller group.

[0074] In one preferred embodiment, there are two main electroplating baths in each of which there is one guide roller in the first guide roller group; said first anode is vertically disposed; there are two pairs of said first anode groups and said first conductor roller groups; there are two second guide roller groups; said second anodes are a pair of anodes vertically disposed; there are one pair of the second conductor roller groups; a third guide roller is disposed at one side adjacent to the unreeling machine above the pre-electroplating bath, and parallel to the conductor roller in the second conductor roller group.

[0075] In another preferred embodiment, each conductor roller of the first and second conductor roller groups is respectively connected with the transmission unit which can make each conductor roller of the first and second conductor roller groups corotating or contra rotating at the same running speed

[0076] In another preferred embodiment, the vertical distance between each pair of the conductor rollers of the first conductor roller group and the main electroplating bath can be adjusted; the distance between two conductor rollers adjacent to each other in said first conductor roller group can be adjusted; the vertical distance between each pair of the conductor rollers of the second conductor roller group and the pre-electroplating bath can be adjusted; the distance between two conductor rollers adjacent to each other in said second conductor roller group can be adjusted.

[0077] In one preferred embodiment, such process comprises the pre-electroplating and main electroplating steps, adjusting the vertical distance between the conductor rollers of the first and second conductor roller groups and the surface of the plating solution in the main electroplating bath and the pre-electroplating bath, so as to make the vertical distance between the lowest level surface of the external surface of each pair of the conductor rollers of the first and second conductor roller groups and the surface of the plating solution be 3-20 mm. Such embodiment can reduce the current loss during the conduction process.

[0078] In another preferred embodiment, the pre-plating may be conducted under any pre-plating conditions, preferably an electroplating temperature of 20-28°C, an average cathode current density of 10-40, preferably 15-25 ampere/decimeter², and a running speed of the film of 10-50 m/h, preferably 15-30 m/h; the main plating may be conducted under any main plating conditions, preferably an electroplating temperature of 20-28°C, an average cathode current density of 2-15 ampere/decimeter², preferably 5-10 ampere/decimeter², and a running speed of the film of 10-50 m/h, preferably 15-30 m/h. The electroplating according to such embodiment makes the CCLs deposited on the films very homogenous and compact.

[0079] In another preferred embodiment, the pre-plating is conducted under the conditions of an electroplating temperature of 20-25°C, an average cathode current density of 15-25 ampere/decimeter², and a running speed of the film of 15-30 m/h; the main plating is conducted under the conditions of an electroplating temperature of 20-25°C, an average cathode current density of 5-10 ampere/decimeter², and a running speed of the film of 15-30 m/h. The electroplating under such conditions makes the CCLs deposited on the films more homogenous and compact.

[0080] In one preferred embodiment of the present invention, the electroplating solution for electroplating may be any electrocoppering solution in the art, preferably a solution comprising 60-150 g/l of copper sulphate, 60-150 g/l of sulphuric acid, 0.1-0.3 ml/I of hydrochloric acid and 5-15 ml/I of additives. The additives may be any additives in the art, preferably the acidic bright copper plating additives having a trade name of 210 from Guangzhou Atotech Company, so as to make the deposited CCLs have a better flattening and flexibility. The plating solutions in the main plating bath and the pre-plating bath may be the same or different, preferably different from each other.

[0081] In another preferred embodiment of the present invention, such process further comprises passivating after electroplating. Said passivation may be conducted under any applicable passivation conditions in the art, preferably a passivation temperature of 20-30°C, a film running speed of 10-50 m/h. The passivation solution used for passivation may be any passivation solution used in the art, preferably an aqueous an aqueous solution comprising 0.2-5 g/l of benzotriazole, e.g LT-02 antirust passivation agent from Guangzhou Liangdi Chemicals.

[0082] After electroplating, said films are washed with a solution which may be any solution in the art for washing, preferably water. After water washing, the films may be air dried, or dried at a temperature for drying films in the art, preferably of 100-120°C.

[0083] The present invention is detailedly stated by the following examples.

[0084] The continuous ion implantation and plasma deposition steps of the process provided by the present invention are conducted in the following equipment for ion implantation and plasma deposition of films, wherein the ion source of the equipment is the magnetic filter vacuum arc ion source (as shown in Fig.1); the vacuum chamber part is shown in Fig.2.

[0085] The vacuum chamber part 8 is equipped with an unreeling roller 81, a transition wheel 82, a tension adjusting roller 83, a traction wheel, a wind up roller 85, a cooling roller 86, an opening 87 for ion implantation, an opening 88 for plasma deposition, and a vacuum orifice 9.

[0086] The openings for ion implantation and for plasma deposition are connected respectively with magnetic filter vacuum arc ion source, wherein there is a voltage (not shown) applying for accelerating the ion beam stream emitted from the ion source between the openings 87 and 88 and B. Said openings are in a rectangular form, wherein the size axially vertical to said cooling roller has a length of 50 mm, and the size in the other direction has a length of 265 mm. The axis of said cooling roller has a diameter of 70 mm, and the distance between the openings thereof and the corresponding cooling roller axial line is 85 mm. The distance between two adjacent openings on the same wall is 105 mm.

[0087] In one preferred embodiment, said continuous electroplating steps of the process provided by the present invention are conducted in the following electroplating equipment as shown in Fig.3, comprising a pre-electroplating bath, a main electroplating bath B, a main electroplating bath C, a water washing bath D, a passivation bath E and a water washing bath F, a unreeling machine 1, a wind up machine 2, a fourth guide roller 3, a third guide roller 4, a sixth guide roller 5, a seventh guide roller 6, a seventh guide roller 7, a eighth guide roller 8, a first guide roller group 9, a first guide roller group 10, a drying oven between the wind up roller 2 and the eighth guide roller 8; a second guide roller 11, a fourth guide roller 12, a fourth guide roller 14, a fifth guide roller 13, a third guide roller 15; a second anode group 16, a first anode group 17, a first anode group 18, a first anode group 19, a first anode group 20; a second conductor roller group 21, a first conductor roller group 22, a first conductor roller group 23, a first conductor roller group 24 and a first conductor roller group 25.

[0088] As shown in Fig.4, the continuous electroplating equipment provided in the present invention further comprises a rectifier a, a rectifier b, a rectifier c and a rectifier connected with the first anode group, second anode group, first conductor roller and second conductor roller.

[0089] Such continuous electroplating equipment further comprises a transmission unit (not shown) respectively connected with each conductor roller of the first and second conductor roller groups, such transmission unit being able to making each conductor roller of the first and second conductor roller groups corotating or contrarotating at the same running speed. Said transmission unit is an electric machine-driven turbine worm gear unit. In addition, such electroplating equipment further comprises the electric machines respectively connected with said unreeling machine and wind up machine.

[0090] During the electroplating, the films to be treated are placed on the unreeling machine 1; one end of the films passes in turn a third guide roller 15, a second guide roller 11, a second conductor roller group 21, a fourth guide roller 3, a first conductor roller group 22, a first guide roller group 9, a first conductor roller group 23, a third guide roller 4, a first conductor roller group 24, a first guide roller group 10, a first conductor roller group 25, a sixth guide roller 5, a fourth guide roller 12, a seventh guide roller 6, a fifth guide roller 13, a seventh guide roller 7, a fourth guide roller 14, a eighth guide roller 8, a driving oven 26 and is finally wrapped on the wind up roller 2. The electroplating solution is injected into the electroplating bath and each main electroplating bath; each electric machine starts; the rotating speed of the electric machine is regulated to make the film running at the required speed.

Example 1

[0091] Deposited copper films (Injected copper + deposited copper) having a thickness of 25 nm at each side of the PI films, then electroplating a copper layer having a thickness of 12 µm
Experimental process:

(1) placing a roll of PI films (having a thickness of 0.025 mm and a width of 270 mm) on the unreeling roller, passing one end of the PI films through the tension adjusting unit, all cooling rollers, the tension adjusting unit in turn, and finally fixing on the wind up roller; feeding the cooling water having a temperature of 0-10°C into the cooling roller, vacuating to have a vacuum degree of 5x10^-4 Pa; turning on the ion source and the accelerating voltage, so make the PI films have a running speed of 2 m/minute.

(2) Ion implantation and deposition: a copper ion source is used therein, wherein the ion implantation voltage is 5 KV; the injection dosage is 3x10¹⁴ atoms/cm²; the plasma deposition voltage is 0.2 KV; the ion beam stream is 40 milliampere; the copper film on the resultant films has a thickness of 25 nm of copper clad layer.

(3) electroplating: In the pre-electroplating bath, the pre-plating solution has a temperature of 25°C and an average cathode current density of 15 amperes/dm², and comprises 60 g/l of copper sulfate, 100 g/l of sulfuric acid, 0.2 ml/l of hydrochloric acid, 10 ml/l of Atotech 210 plating bath agent, 0.8 ml/l of Atotech 210A, and 0.6 ml/l of Atotech 210 B. In the main electroplating bath, the electroplating solution has a temperature of 25°C and an average cathode current density of 3.9 amperes/dm², and comprises 60 g/l of copper sulfate, 100 g/l of sulfuric acid, 0.15 ml/l of hydrochloric acid, 10 ml/l of Atotech 210 plating bath agent, 0.8 ml/l of Atotech 210A, and 0.6 ml/l of Atotech 210 B. The films have a running speed of 10 m/minute.

[0092] After the electroplating, the films pass the rinsing bath filled with water for washing, are passivated in a passivation bath, and are washed in a rinsing bath filled with water, pass through a dryer to dry the films at a temperature of 10°C. Said passivation conditions comprise a passivation temperature of 25°C, and a running speed of the films of 10 m/h. The passivation solution is an aqueous solution comprising 0.2 g/l of benzotriazole (LT-02 from Guangzhou Liangdi Chemicals).

[0093] A copper layer having a thickness of 12 µm is electroplated and deposited, and the copper layer is compact and smooth.

Example 2 Depositing 200 nm copper films (Injected copper + deposited copper) at each side of the PI films, then electroplating a copper layer having a thickness of 12 µm

[0094] Experimental process:

(1) except for the running speed of PI film of 0.3 m/minutes, other operations all are the same as those in step (1) of Example 1.

(2) Ion implantation and deposition: a copper ion source is used therein, wherein the ion implantation voltage is 6 KV; the injection dosage is 1x10¹⁶ atoms/cm²; the plasma deposition voltage is 0.3 KV; the ion beam stream is 70 milliampere; the copper film (injected copper + deposited copper)on the resultant films has a thickness of 200 nm.

(3) electroplating: In the pre-electroplating bath, the pre-plating solution has a temperature of 20°C and an average cathode current density of 25 amperes/dm², and comprises 150 g/l of copper sulfate, 60 g/l of sulfuric acid, 0.1 ml/l of hydrochloric acid, 5 ml/l of an plating bath agent, 0.5 ml/l of Atotech 210A, and 0.3 ml/l of Atotech 210 B. In the main electroplating bath, the electroplating solution has a temperature of 20°C and an average cathode current density of 15 ampere/dm², and comprises 120 g/l of copper sulfate, 80 g/l of sulfuric acid, 0.15 ml/l of hydrochloric acid, 7 ml/l of Atotech 210 plating bath agent, 0.6 ml/l of Atotech 210A, and 0.5 ml/l of Atotech 210 B. The films have a running speed of 50 m/minute.

[0095] After the electroplating, the films pass the rinsing bath filled with water for washing, are passivated in a passivation bath, and are washed in a rinsing bath filled with water, pass through a dryer to dry the films at a temperature of °C. Said passivation conditions comprise a passivation temperature of 20°C, and a running speed of the films of 50 m/h. The passivation solution is an aqueous solution comprising 1 g/l of benzotriazole (LT-02 from Guangzhou Liangdi Chemicals).

[0096] A copper layer having a thickness of 7 µm is electroplated and deposited, and the copper layer is compact and smooth.

Example 3 Depositing metal films (injecting nickel + deposited nickel + deposited copper) having a thickness of 100 nm at each side of the PI films

[0097] Experimental process:

(1) except for the running speed of PI film of 0.4 m/minutes, other operations all are the same as those in step (1) of Example 2.

(2) Ion implantation and deposition: four nickel ion sources and two copper ion sources are used therein, wherein the nickel ion implantation voltage is 6 KV; the injection dosage is 3x10¹⁴ atoms/cm²; under the following conditions, the nickel plasma deposition and copper plasma deposition are carried out at a voltage of 0.2 KV; the ion beam stream is 40 milliampere; the metal film (injecting nickel + deposited nickel + deposited copper) on the resultant films has a thickness of 100 nm.

(3) electroplating: In the pre-electroplating bath, the pre-plating solution has a temperature of 22°C and an average cathode current density of 30 amperes/dm2, and comprises 150 g/l of copper sulfate, 80 g/l of sulfuric acid, 0.2 ml/l of hydrochloric acid, 7 ml/l of an plating bath agent, 0.7 ml/l of Atotech 210A, and 0.5 ml/l of Atotech 210 B. In the main electroplating bath, the electroplating solution has a temperature of 22°C and an average cathode current density of 17 ampere/dm², and comprises 100 g/l of copper sulfate, 100 g/l of sulfuric acid, 0.2 ml/l of hydrochloric acid, 11 ml/l of an plating bath agent, 0.9 ml/l of Atotech 210A, and 0.7 ml/l of Atotech 210 B. The films have a running speed of 40 m/minute.

[0098] After the electroplating, the films pass the rinsing bath filled with water for washing, are passivated in a passivation bath, and are washed in a rinsing bath filled with water, pass through a dryer to dry the films at a temperature of 120°C. Said passivation conditions comprise a passivation temperature of 22°C, and a running speed of the films of 40 m/h. The passivation solution is an aqueous solution comprising 3 g/l of benzotriazole (LT-02 from Guangzhou Liangdi Chemicals).

[0099] A copper layer having a thickness of 9 µm is electroplated and deposited, and the copper layer is compact and smooth.

Example 4 Depositing metal films (Injected chromium + deposited chromium + deposited copper) having a thickness of 50 nm at each side of the PET films

[0100] Experimental process:

(1) except for the running speed of PET film of 0.6 m/minutes, other operations all are the same as those in step (1) of Example 2.

(2) Four chromium ion sources and two copper ion sources are used therein, wherein the chromium ion implantation voltage is 6 KV; the injection dosage is 3x10¹⁴ atoms/cm²; under the following conditions, the chromium plasma deposition and copper plasma deposition are carried out at a voltage of 0.5 KV; the ion beam stream is 20 milliampere; the metal film on the resultant films has a thickness of 50 nm, and the metal layer has a homogeneous and compact structure.

(3) electroplating: In the pre-electroplating bath, the pre-plating solution has a temperature of 28°C and an average cathode current density of 20 amperes/dm², and comprises 100 g/l of copper sulfate, 150 g/l of sulfuric acid, 0.2 ml/l of hydrochloric acid, 10 ml/l of an plating bath agent, 0.8 ml/l of Atotech 210A, and 0.6 ml/l of Atotech 210 B. In the main electroplating bath, the electroplating solution has a temperature of 28°C and an average cathode current density of 12 ampere/dm2, and comprises 80 g/l of copper sulfate, 60 g/l of sulfuric acid, 0.15 ml/l of hydrochloric acid, 10 ml/l of Atotech 210 plating bath agent, 0.8 ml/l of Atotech 210A, and 0.6 ml/l of Atotech 210 B. The films have a running speed of 20 m/minute.

[0101] After the electroplating, the films pass the rinsing bath filled with water for washing, are passivated in a passivation bath, and are washed in a rinsing bath filled with water, pass through a dryer to dry the films at a temperature of 100°C. Said passivation conditions comprise a passivation temperature of 30°C, and a running speed of the films of 20 m/h. The passivation solution is an aqueous solution comprising 0.5 g/l of benzotriazole (LT-02 from Guangzhou Liangdi Chemicals).

[0102] A copper layer having a thickness of 12 µm is electroplated and deposited, and the copper layer is compact and smooth.

Example 5 Depositing metal films (Injected copper + deposited nickel + deposited copper) having a thickness of 50 nm at each side of the PI films

[0103] Experimental process:

(1) except for the running speed of PET film of 0.8 m/minutes, other operations all are the same as those in step (1) of Example 2.

(2) Two nickel ion sources and four copper ion sources are used therein, wherein the chromium ion implantation voltage is 5 KV; the injection dosage is 3x10¹³ atoms/cm²; the nickel plasma deposition and copper plasma deposition are carried out subsequently at a voltage of 0.4 KV; the ion beam stream is 30 milliampere; the metal film on the resultant films has a thickness of 50 nm, and the metal layer has a homogeneous and compact structure.

(3) electroplating: In the pre-electroplating bath, the pre-plating solution has a temperature of 24°C and an average cathode current density of 40 amperes/dm², and comprises 150 g/l of copper sulfate, 120 g/l of sulfuric acid, 0.2 ml/l of hydrochloric acid, 8 ml/l of an plating bath agent, 0.6 ml/l of Atotech 210A, and 0.7 ml/l of Atotech 210 B. In the main electroplating bath, the electroplating solution has a temperature of 24°C and an average cathode current density of 21 ampere/dm², and comprises 120 g/l of copper sulfate, 150 g/l of sulfuric acid, 0.3 ml/l of hydrochloric acid, 12 ml/l of an plating bath agent, 0.9 ml/l of Atotech 210A, and 0.8 ml/l of Atotech 210 B. The films have a running speed of 30 m/minute.

[0104] After the electroplating, the films pass the rinsing bath filled with water for washing, are passivated in a passivation bath, and are washed in a rinsing bath filled with water, pass through a dryer to dry the films at a temperature of 120°C. Said passivation conditions comprise a passivation temperature of 24°C, and a running speed of the films of 30 m/h. The passivation solution is an aqueous solution comprising 5 g/l of benzotriazole (LT-02 from Guangzhou Liangdi Chemicals).

[0105] A copper layer having a thickness of 12 µm is electroplated and deposited, and the copper layer is compact and smooth.

Example 6 Depositing metal films (deposited nickel + deposited copper) having a thickness of 50 nm at each side of the PI films (not part of the present invention)

[0106] Experimental process:

(1) except for the running speed of PI film of 0.5 m/minutes, other operations all are the same as those in step (1) of Example 2.

(2) directly conducting the nickel plasma deposition without ion implantation, subsequently the copper plasma deposition at a deposition voltage of 0.2 KV, wherein the ion beam stream is 20 milliampere. The metal film of the resultant films has a thickness of about 50 nm, and the metal layer has a homogeneous and compact structure.

(3) electroplating: the same as step (3) in Example 1.

[0107] A copper layer having a thickness of 12 µm is electroplated and deposited, and the copper layer is compact and smooth.

Example 7 Depositing metal films (depositing molybdenum + deposited nickel) having a thickness of 50 nm at each side of the PI films (not part of the present invention)

[0108] Experimental process:

(1) except for the running speed of PI film of 0.5 m/minutes, other operations all are the same as those in step (1) of Example 2.

(2) directly conducting the molybdenum plasma deposition without ion implantation, subsequently the nickel plasma deposition at a deposition voltage of 0.2 KV, wherein the ion beam stream is 20 milliampere. The metal film of the resultant films has a thickness of about 50 nm, and the metal layer has a homogeneous and compact structure.

(3) electroplating: the same as step (3) in Example 1.

[0109] A copper layer having a thickness of 12 µm is electroplated and deposited, and the copper layer is compact and smooth.

Performance test: Detection of the bonding force and soldering resistance between the FCCLs prepared in Examples 1-7 and the substrate films

[0110] Test method: detecting according to the CPCA/JPCA-BM03-2005 standard " FCCLs for printed circuit " of China Printed Circuit Industry Association, and the test results are shown in Table 1.

Table 1 List of the performance detection results

Test No.	Film name	Film layer composition	Film layer thickness	Electroplating copper layer thickness	Test status		Conclusion	Notes
					Peeling strength	Soldering resistance
Exp.1	PI	Injected copper + deposited copper	25 nm	12 µm	0.56	Good	Qualified	Double-sided
Exp.2	PI	Injected copper + deposited copper	200 nm	12 µm	0.61	Good	Qualified	Double-sided
Exp.3	PI	Injecting nickel + deposited nickel + deposited copper	100nm	9 µm	0.83	Good	Qualified	Double-sided
Exp.4	PET	Injected chromium + deposited chromium + deposited copper	50 nm	12 µm	0.76	Good	Qualified	Double-sided
Exp.5	PI	Injected copper + deposited nickel + deposited copper	50 nm	12 µm	0.69	Good	Qualified	Double-sided
Exp.6	PI	Deposited nickel + deposited copper	50 nm	12 µm	0.73	Good	Qualified	Double-sided
Exp.7	PI	Deposited molybdenum + deposited nickel	50 nm	12 µm	0.67h	Good	Qualified	Double-sided

Notes: 1. the peeling strength unit: N/mm; 2. Detecting according to the CPCA/JPCA-BM03-2005 standard "FCCLs for printed circuit" of China Printed Circuit Industry Association

[0111] According to Table 1, it can be seen that FCCLs prepared according to the processes provided by the present invention has a lower thickness and conforms to the development tendency of flexible printed circuit (FPC). Moreover, the FCCLs have a better bonding force between the metal layer and the substrate film and a good soldering resistance.

Claims

1. A process for the continuous production of flexible copper-clad laminate, characterized in comprising the sequent steps of:

conducting a continuous ion implantation to a surface of an organic macromolecular polymer film;

conducting a plasma deposition on the ion implanted surface of the organic macromolecular polymer film; and

continuously electrocoppering the plasma deposited surface of the organic macromolecular polymer film,

wherein said ion implantation is conducted under the conditions of a running speed of said organic macromolecular polymer film of 0.3-2 m/minute, an ion implantation voltage of 1-10 KV, an ion implantation dosage of 0.5x10¹³-1.0x10¹⁷ atom/cm²; said plasma deposition is conducted under the conditions of a plasma deposition voltage of 100-500 V and an ion beam stream of 20-80 milliampere,

wherein said continuous ion implantation and plasma deposition are carried out in an equipment comprising an ion source and a vacuum chamber; the vacuum chamber comprises on the walls a vacuum orifice and at least one opening connecting with said ion source; the vacuum chamber comprises a unreeling roller, a tension adjusting unit, a cooling part, and a wind up roller; said cooling part is placed between said unreeling roller and wind up roller; said tension adjusting unit is displaced at both sides of the cooling part and between said unreeling roller and wind up roller; said cooling part consists of at least one hollow cooling roller free to rotate and in which the cooling medium passes; said cooling roller, unreeling roller and wind up roller are parallel to each other, and the cooling roller is axially perpendicular to the direction along which said plasma is fed into the vacuum chamber.

2. The process according to claim 1, wherein said equipment further comprises an electric machine connected with said unreeling roller and wind up roller and a part for accelerating the ion beam stream emitted from said ion source, said part being disposed between said plasma source and said vacuum chamber.

3. The process according to claim 2, wherein there are 6 openings, three of which are respectively on two opposite walls of the vacuum chamber; two sides of said openings axially perpendicular to said cooling roller have a size of 30-100 mm; said cooling roller has a diameter of 50-100 mm; the distance between said openings and the axial line of said cooling roller corresponding thereto ranges from 50 to 150 mm; the distance between two adjacent openings on the same wall ranges from 75 to 200 mm.

4. The process according to any one of claims 1 to 3, wherein said vacuum chamber has a vacuum degree of 2x10³-5x10^-5 Pa; said organic macromolecular polymer film has a thickness of 3-150 µm; said plasma deposition is conducted under the conditions of a running speed of said organic macromolecular polymer film of 0.3-2 m/minute.

5. The process according to claim 4, wherein said organic macromolecular polymer film has a thickness of 10-50 µm; said ion implantation is conducted under the conditions of an ion implantation voltage of 5-10 KV, an ion implantation dosage of 0.5x10¹⁴-5.0x10¹⁶ atom/cm²; said plasma deposition is conducted under the conditions of an ion beam stream of 20-40 milliampere and a plasma deposition voltage of 100-300 V.

6. The process according to claim 4, wherein said organic macromolecular polymer film is a polyimide film, a polyhexylene terephthalate film, a liquid crystal polymer film or a polyparabanic acid film.

7. The process according to claim 4, wherein the substance to be ion injected and plasma deposited is a metal which is one or more selected from the group consisting of chromium, nickel, copper and molybdenum.

8. The process according to claim 1 or 4, wherein said continuous electroplating is conducted in the following electroplating equipment comprising a unreeling machine, a wind up machine, at least one main electroplating bath, a first conductor roll group even-paired horizontally disposed and parallel to each other, and a rectifier; said main electroplating bath is non-horizontally equipped with a first anode group in which said even-paired are parallel to each other; each pair of anodes in said first anode group are two anodes adjacently disposed; each anode in the first anode group is connected with the anode of the rectifier; at least one first guide roller group parallel to the conductor roller in the first conductor roller group; the guide roller of the first guide roller group is disposed below the lowest level of the anode of the first anode group to guide the operation of the film in said main electroplating bath; the conductor roller of the first conductor roller group is disposed at a position above the main electroplating bath and corresponding to the anode of the first anode group; each pair of the conductor rollers in the first conductor roller group are connected with the cathode of the rectifier; each pair of the conductor rollers in the first conductor roller group are two conductor rollers adjacently disposed and used in turn for being in contact with the films fed into the main electroplating bath and the film discharged from said main electroplating bath;
said electroplating equipment further comprises at least a pre-electroplating bath and a second conductor roll group odd-paired horizontally disposed and parallel to each other; the conductor rollers in said second conductor roller group are parallel to the conductor roller in said first conductor roller group; said pre-electroplating bath is non-horizontally equipped with a second anode group in which said odd-paired are parallel to each other; each pair of anodes in said second anode group are two anodes adjacently disposed; each anode in the first anode group is connected with the anode of the rectifier; at least one second guide roller group, the guide roller of which is parallel to the conductor roller in the second conductor roller group; the second guide roller group is disposed below the lowest level of the second anode to guide the operation of the film in said pre-electroplating bath; the conductor roller of the second conductor is disposed at a position above the pre-electroplating bath and corresponding to the anode of the second anode group; each pair of the conductor rollers in the second conductor roller group are connected with the cathode of the rectifier; each pair of the conductor rollers in the second conductor roller group are two conductor rollers adjacently disposed and used in turn for being in contact with the films fed into the pre-electroplating bath and the film discharged from said pre-electroplating bath; a fourth guide roller being disposed between the pre-electroplating bath and said main electroplating bath and disposed parallel to the conductor rollers in the first conductor roller group.

9. The process according to claim 8, wherein there are two main electroplating baths in each of which there is one guide roller in the first guide roller group; said first anode is vertically disposed; there are two pairs of said first anode groups and said first conductor roller groups; there are two second guide roller groups in the pre-electroplating bath; said second anodes are a pair of anodes vertically disposed; there are one pair of the second conductor roller groups; a third guide roller is disposed at one side adjacent to the unreeling machine above the pre-electroplating bath, and parallel to the conductor roller in the second conductor roller group; preferably, wherein each conductor roller of the first and second conductor roller groups are respectively connected with the transmission unit which can make each conductor roller of the first and second conductor roller groups corotating or contrarotating at the same running speed.

10. The process according to claim 9, wherein the vertical distance between each pair of the conductor rollers of the first conductor roller group and the main electroplating bath can be adjusted; the distance between two conductor rollers adjacent to each other in said first conductor roller group can be adjusted; the vertical distance between each pair of the conductor rollers of the second conductor roller group and the pre-electroplating bath can be adjusted; the distance between two conductor rollers adjacent to each other in said second conductor roller group can be adjusted.

11. The process according to claim 10, comprising the pre-electroplating step and main electroplating step, adjusting the vertical distance between the conductor rollers of said first and conductor roller groups and the bath surface in said main electroplating and pre-electroplating baths, to make the vertical distance between the lowest level at which the outer surfaces of each pair of the conductor rollers of said first and conductor roller groups are positioned and the bath surface ranging from 3 to 20 mm.

12. The process according to claim 10, wherein the pre-plating is conducted under the conditions of an electroplating temperature of 20-28°C, an average cathode current density of 10-40 ampere/decimeter², and a running speed of the film of 10-50 m/h; the main plating is conducted under the conditions of an electroplating temperature of 20-28°C, an average cathode current density of 2-15 ampere/decimeter², and a running speed of the film of 10-50 m/h.

13. The process according to claim 12, wherein the pre-plating is conducted under the conditions of an electroplating temperature of 20-25°C, an average cathode current density of 15-25 ampere/decimeter², and a running speed of the film of 15-30 m/h; the main plating is conducted under the conditions of an electroplating temperature of 20-25°C, an average cathode current density of 5-10 ampere/decimeter², and a running speed of the film of 15-30 m/h; preferably, the process further comprising the step of passivation after electroplating, wherein said passivation is conducted at a temperature of 20-30°C, a running speed of the film of 10-50 m/h; the passivation solution used for passivation comprises an aqueous solution comprising 0.2-5 g/l of benzotriazole.

14. The process according to claim 12, wherein the electroplating solution used for electroplating comprises 60-150 g/l of copper sulphate, 60-150 g/l of sulfuric acid, 0.1-0.3 ml/l of hydrochloric acid and 5-15 ml/l of additives.

Ansprüche

1. Verfahren zur kontinuierlichen Herstellung eines flexiblen Kupferplattierungslaminats, dadurch gekennzeichnet, dass es die folgenden aufeinanderfolgenden Schritte umfasst:

Durchführen einer kontinuierlichen Ionenimplantation bei einer Oberfläche eines organischen makromolekularen Polymerfilms;

Durchführen einer Plasmabeschichtung auf der ionenimplantierten Oberfläche des organischen makromolekularen Polymerfilms; und

kontinuierliches Elektroverkupfern der plasmabeschichteten Oberfläche des organischen makromolekularen Polymerfilms,

wobei die Ionenimplantation unter den Bedingungen einer Laufgeschwindigkeit des organischen makromolekularen Polymerfilms von 0,3-2 m/Minute, einer Ionenimplantationsspannung von 1-10 KV, einer Ionenimplantationsdosierung von 0,5x10¹³-1,0x10¹⁷ Atome/cm² durchgeführt wird; wobei die Plasmabeschichtung unter den Bedingungen einer Plasmabeschichtungsspannung von 100-500 V und eines Ionenstrahlstroms von 20-80 Milliampere durchgeführt wird,

wobei die kontinuierliche Ionenimplantation und Plasmabeschichtung in einem Gerät durchgeführt werden, das eine lonenquelle und eine Vakuumkammer umfasst; wobei die Vakuumkammer an den Wänden eine Vakuumöffnung umfasst sowie wenigstens eine Öffnung, die eine Verbindung mit der lonenquelle herstellt; wobei die Vakuumkammer eine Abspulrolle, eine Spannungseinstelleinheit, ein Kühlteil, und eine Aufwickelrolle umfasst; wobei das Kühlteil zwischen der Abspulrolle und der Aufwickelrolle platziert ist; wobei die Spannungseinstelleinheit an beiden Seiten des Kühlteils und zwischen der Abspulrolle und der Aufwickelrolle platziert ist; wobei das Kühlteil aus wenigstens einer hohlen Kühlrolle besteht, die frei drehbar ist, und in der das Kühlmedium passiert; wobei die Kühlrolle, die Abspulrolle und die Aufwickelrolle parallel zueinander sind, und wobei die Kühlrolle axial orthogonal zu der Richtung ist, entlang der das Plasma in die Vakuumkammer eingeführt wird.

2. Verfahren nach Anspruch 1, wobei das Gerät ferner eine elektrische Maschine umfasst, die mit der Abspulrolle und der Aufwickelrolle verbunden ist, und ein Teil zum Beschleunigen des Ionenstrahlstroms, der von der lonenquelle emittiert wird, wobei das Teil zwischen der Plasmaquelle und der Vakuumkammer angeordnet ist.

3. Verfahren nach Anspruch 2, wobei sechs Öffnungen vorgesehen sind, von denen drei jeweils an zwei entgegengesetzten Wänden der Vakuumkammer sind; wobei zwei Seiten der Öffnungen axial orthogonal zu der Kühlrolle eine Größe von 30-100 mm haben; wobei die Kühlrolle einen Durchmesser von 50-100 mm hat; wobei der Abstand zwischen den Öffnungen und der Axiallinie der hierzu entsprechenden Kühlrolle von 50 bis 150 mm reicht; wobei der Abstand zwischen zwei benachbarten Öffnungen an der gleichen Wand von 75 bis 200 mm reicht.

4. Verfahren nach einem der Ansprüche 1 bis 3, wobei die Vakuumkammer einen Vakuumgrad von 2x10³-5x10^-5 Pa hat; wobei der organische makromolekulare Polymerfilm eine Dicke von 3-150 µm hat; wobei die Plasmabeschichtung unter den Bedingungen einer Laufgeschwindigkeit des organischen makromolekularen Polymerfilms von 0,3-2 m/Minute durchgeführt wird.

5. Verfahren nach Anspruch 4, wobei der organische makromolekulare Polymerfilm eine Dicke von 10-50 µm hat; wobei die Ionenimplantation unter den Bedingungen einer Ionenimplantationsspannung von 5-10 KV, einer Ionenimplantationsdosierung von 0,5x10¹⁴-5,0x10¹⁶ Atome/cm² durchgeführt wird; wobei die Plasmabeschichtung unter den Bedingungen eines Ionenstrahlstroms von 20-40 Milliampere und einer Plasmabeschichtungsspannung von 100-300 V durchgeführt wird.

6. Verfahren nach Anspruch 4, wobei der organische makromolekulare Polymerfilm ein Polyimidfilm, ein Polyhexylenterephtalatfilm, ein Flüssigkristallpolymerfilm oder ein Polyparabansäurefilm ist.

7. Verfahren nach Anspruch 4, wobei die Substanz für die Ioneninjektion und Plasmabeschichtung ein Metall ist, welches eines oder mehr ausgewählt aus der Gruppe bestehend aus Chrom, Nickel, Kupfer und Molybdän ist.

8. Verfahren nach Anspruch 1 oder 4, wobei die kontinuierliche Elektroplattierung in dem folgenden Elektroplattierungsgerät durchgeführt wird, umfassend eine Abspulmaschine, eine Aufwickelmaschine, wenigstens ein Hauptelektroplattierbad, eine erste Leiterrollengruppe, die geradpaarig horizontal angeordnet und parallel zueinander ist, und einen Gleichrichter; wobei das Hauptelektroplattierbad nicht-horizontal mit einer ersten Anodengruppe ausgestattet ist, in der die Geradpaarigen parallel zueinander sind; wobei jedes Paar von Anoden in der ersten Anodengruppe zwei benachbart angeordnete Anoden sind; wobei jede Anode in der ersten Anodengruppe mit der Anode des Gleichrichters verbunden ist; wenigstens eine erste Führungsrollengruppe parallel zu der Leiterrolle in der ersten Leiterrollengruppe; wobei die Führungsrolle der ersten Führungsrollengruppe unter dem untersten Niveau der Anode der ersten Anodengruppe angeordnet ist, um den Betrieb des Films in dem Hauptelektroplattierbad zu führen; wobei die Leiterrolle der ersten Leiterrollengruppe an einer Position über dem Hauptelektroplattierbad und entsprechend der Anode der ersten Anodengruppe angeordnet ist; wobei jedes Paar der Leiterrollen in der ersten Leiterrollengruppe mit der Kathode des Gleichrichters verbunden sind; wobei jedes Paar der Leiterrollen in der ersten Leiterrollengruppe zwei benachbart angeordnete Leiterrollen sind, die wiederum dazu verwendet werden, in Kontakt mit den Filmen zu sein, die in das Hauptelektroplattierbad zugeführt werden, und dem Film, der von dem Hauptelektroplattierbad ausgegeben wird;
wobei das Elektroplattiergerät ferner wenigstens ein Vorelektroplattierbad und eine zweite Leiterrollengruppe umfasst, die ungeradpaarig horizontal angeordnet und parallel zueinander sind; wobei die Leiterrollen in der zweiten Leiterrollengruppe parallel zu der Leiterrolle in der ersten Leiterrollengruppe sind; wobei das Vorelektroplattierbad nicht-horizontal mit einer zweiten Anodengruppe ausgestattet ist, in der die Ungeradpaarigen parallel zueinander sind; wobei jedes Paar von Anoden in der zweiten Anodengruppe zwei benachbart angeordnete Anoden sind; wobei jede Anode in der ersten Anodengruppe mit der Anode des Gleichrichters verbunden ist; wenigstens eine zweite Führungsrollengruppe, deren Führungsrolle parallel zu der Leiterrolle in der zweiten Leiterrollengruppe ist; wobei die zweite Führungsrollengruppe unter dem untersten Niveau der zweiten Anode angeordnet ist, um den Betrieb des Films in dem Vorelektroplattierbad zu führen; wobei die Leiterrolle des zweiten Leiters an einer Position über dem Vorelektroplattierbad und entsprechend der Anode der zweiten Anodengruppe angeordnet ist; wobei jedes Paar der Leiterrollen in der zweiten Leiterrollengruppe mit der Kathode des Gleichrichters verbunden sind; wobei jedes Paar der Leiterrollen in der zweiten Leiterrollengruppe zwei Leiterrollen sind, die benachbart angeordnet sind und wiederum dazu verwendet werden, in Kontakt mit den Filmen zu sein, die in das Vorelektroplattierbad zugeführt werden, und dem Film, der von dem Vorelektroplattierbad ausgegeben wird; wobei eine vierte Führungsrolle zwischen dem Vorelektroplattierbad und dem Hauptelektroplattierbad angeordnet ist und parallel zu den Leiterrollen in der ersten Leiterrollengruppe angeordnet ist.

9. Verfahren nach Anspruch 8, wobei zwei Hauptelektroplattierbäder vorgesehen sind, in denen jeweils eine Führungsrolle in der ersten Führungsrollengruppe vorgesehen ist; wobei die erste Anode vertikal angeordnet ist; wobei zwei Paare von den ersten Anodengruppe und den ersten Leiterrollengruppen vorgesehen sind; wobei zwei zweite Führungsrollengruppen in dem Vorelektroplattierbad vorgesehen sind; wobei die zweiten Anoden ein Paar von vertikal angeordneten Anoden sind; wobei ein Paar der zweiten Leiterrollengruppen vorgesehen ist; wobei eine dritte Führungsrolle an einer Seite benachbart zu der Abspulmaschine über dem Vorelektroplattierbad und parallel zu der Leiterrolle in der zweiten Leiterrollengruppe angeordnet ist; wobei vorzugsweise jede Leiterrolle der ersten und der zweiten Leiterrollengruppe jeweils mit der Getriebeeinheit verbunden ist, die bewirken kann, dass jede Leiterrolle der ersten und der zweiten Leiterrollengruppe mit der gleichen Laufgeschwindigkeit zusammen rotiert oder gegenrotiert.

10. Verfahren nach Anspruch 9, wobei der vertikale Abstand zwischen jedem Paar der Leiterrollen der ersten Leiterrollengruppe und dem Hauptelektroplattierbad eingestellt werden kann; wobei der Abstand zwischen zwei zueinander benachbarten Leiterrollen in der ersten Leiterrollengruppe eingestellt werden kann; wobei der vertikale Abstand zwischen jedem Paar der Leiterrollen der zweiten Leiterrollengruppe und dem Vorelektroplattierbad eingestellt werden kann; wobei der Abstand zwischen zwei zueinander benachbarten Leiterrollen in der zweiten Leiterrollengruppe eingestellt werden kann.

11. Verfahren nach Anspruch 10, umfassend den Vorelektroplattierschritt und Hauptelektroplattierschritt, Einstellen des vertikalen Abstands zwischen den Leiterrollen der ersten und Leiterrollengruppen und der Badoberfläche in den Hauptelektroplattier- und Vorelektroplattierbädern, um den vertikalen Abstand zwischen dem untersten Niveau, bei dem die Außenoberflächen jedes Paars der Leiterrollen der ersten und Leiterrollengruppen positioniert sind, und der Badoberfläche in einen Bereich von 3 bis 20 mm zu bringen.

12. Verfahren nach Anspruch 10, wobei die Vorplattierung unter den Bedingungen einer Elektroplattiertemperatur von 20-28° C, einer mittleren Kathodenstromdichte von 10-40 Ampere/Dezimeter², und einer Laufgeschwindigkeit des Films von 10-50 m/h durchgeführt wird; wobei die Hauptplattierung unter den Bedingungen einer Elektroplattiertemperatur von 20-28° C, einer mittleren Kathodenstromdichte von 2-15 Ampere/Dezimeter², und einer Laufgeschwindigkeit des Films vom 10-50 m/h durchgeführt wird.

13. Verfahren nach Anspruch 12, wobei die Vorplattierung unter den Bedingungen einer Elektroplattiertemperatur von 20-25° C, einer mittleren Kathodenstromdichte von 15-25 Ampere/Dezimeter², und einer Laufgeschwindigkeit des Films von 15-30 m/h durchgeführt wird; wobei die Hauptplattierung unter den Bedingungen einer Elektroplattiertemperatur von 20-25° C, einer mittleren Kathodenstromdichte von 5-10 Ampere/Dezimeter², und einer Laufgeschwindigkeit des Films von 15-30 m/h durchgeführt wird; wobei das Verfahren vorzugsweise ferner den Schritt der Passivierung nach der Elektroplattierung umfasst, wobei die Passivierung bei einer Temperatur von 20-30° C, einer Laufgeschwindigkeit des Films von 10-50 m/h durchgeführt wird; wobei die Passivierungslösung, die für die Passivierung verwendet wird, eine wässrige Lösung umfasst, die 0,2-5 g/l von Benzotriazol umfasst.

14. Verfahren nach Anspruch 12, wobei die Elektroplattierlösung, die für die Elektroplattierung verwendet wird, 60-150 g/l von Kupfersulfat, 60-150 g/l von Schwefelsäure, 0,1-0,3 ml/l von Salzsäure und 5-15 ml/l von Additiven umfasst.

Revendications

1. Procédé de production en continu d'un stratifié flexible revêtu de cuivre, caractérisé en ce qu'il comprend les étapes successives de :

réalisation d'une implantation d'ions en continu sur une surface d'un film de polymère macromoléculaire organique ;

réalisation d'un dépôt par plasma sur la surface ayant subi l'implantation d'ions du film de polymère macromoléculaire organique ; et

électro-cuivrage en continu de la surface ayant subi le dépôt par plasma du film de polymère macromoléculaire organique,

dans lequel ladite implantation d'ions est réalisée dans les conditions d'une vitesse de défilement dudit film de polymère macromoléculaire organique de 0,3 à 2 m/minute, d'une tension d'implantation d'ions de 1 à 10 KV, d'un dosage d'implantation d'ions de 0,5×10¹³ à 1,0×10¹⁷ atomes/cm² ; ledit dépôt par plasma est réalisé dans les conditions d'une tension de dépôt par plasma de 100 à 500 V et d'un flux de faisceau ionique de 20 à 80 milliampères,

dans lequel ladite implantation d'ions en continu et ledit dépôt par plasma sont effectués dans un équipement comprenant une source d'ions et une chambre à vide ; la chambre à vide comprend sur les parois un orifice de vide et au moins une ouverture se connectant avec ladite source d'ions; la chambre à vide comprend un rouleau de déroulage, une unité de réglage de tension, une partie de refroidissement et un rouleau d'enroulement; ladite partie de refroidissement est placée entre lesdits rouleau de déroulage et rouleau d'enroulement ; ladite unité de réglage de tension est déplacée des deux côtés de la partie de refroidissement et entre lesdits rouleau de déroulage et rouleau d'enroulement ; ladite partie de refroidissement consiste en au moins un rouleau de refroidissement creux libre de tourner et dans lequel passe le milieu de refroidissement; lesdits rouleau de refroidissement, rouleau de déroulage et rouleau d'enroulement sont parallèles les uns aux autres, et le rouleau de refroidissement est axialement perpendiculaire à la direction le long de laquelle ledit plasma est introduit dans la chambre à vide.

2. Procédé selon la revendication 1, dans lequel ledit équipement comprend en outre une machine électrique connectée avec lesdits rouleau de déroulage et rouleau d'enroulement et une partie pour accélérer le flux de faisceau ionique émis par ladite source d'ions, ladite partie étant disposée entre ladite source de plasma et ladite chambre à vide.

3. Procédé selon la revendication 2, dans lequel il y a 6 ouvertures, dont trois se trouvent respectivement sur deux parois opposées de la chambre à vide ; deux côtés desdites ouvertures axialement perpendiculaires audit rouleau de refroidissement ont une taille de 30 à 100 mm ; ledit rouleau de refroidissement a un diamètre de 50 à 100 mm ; la distance entre lesdites ouvertures et la ligne axiale dudit rouleau de refroidissement y correspondant varie de 50 à 150 mm ; la distance entre deux ouvertures adjacentes sur la même paroi varie de 75 à 200 mm.

4. Procédé selon l'une quelconque des revendications 1 à 3, dans lequel ladite chambre à vide a un degré de vide de 2×10³ à 5×10^-5 Pa ; ledit film de polymère macromoléculaire organique a une épaisseur de 3 à 150 µm ; ledit dépôt par plasma est réalisé dans les conditions d'une vitesse de défilement dudit film de polymère macromoléculaire organique de 0,3 à 2 m/minute.

5. Procédé selon la revendication 4, dans lequel ledit film de polymère macromoléculaire organique a une épaisseur de 10 à 50 µm ; ladite implantation d'ions est réalisée dans les conditions d'une tension d'implantation d'ions de 5 à 10 KV, un dosage d'implantation d'ions de 0,5×10¹⁴ à 5,0×10¹⁶ atomes/cm² ; ledit dépôt par plasma est réalisé dans les conditions d'un flux de faisceau ionique de 20 à 40 milliampères et d'une tension de dépôt par plasma de 100 à 300 V.

6. Procédé selon la revendication 4, dans lequel ledit film de polymère macromoléculaire organique est un film de polyimide, un film de poly(téréphtalate d'hexylène), un film de polymère à cristaux liquides ou un film d'acide polyparabanique.

7. Procédé selon la revendication 4, dans lequel la substance à injecter par ions et à déposer par plasma est un métal qui est un ou plusieurs des éléments choisis dans le groupe constitué du chrome, du nickel, du cuivre et du molybdène.

8. Procédé selon la revendication 1 ou 4, dans lequel ledit électroplacage en continu est réalisé dans l'équipement d'électroplacage suivant comprenant une machine de déroulage, une machine d'enroulement, au moins un bain d'électroplacage principal, un premier groupe de rouleaux conducteurs en paires jumelées disposés horizontalement et parallèles les uns aux autres, et un redresseur; ledit bain d'électroplacage principal est équipé de manière non horizontale d'un premier groupe d'anodes dans lequel lesdites paires jumelées sont parallèles les unes aux autres ; chaque paire d'anodes dudit premier groupe d'anodes se compose de deux anodes disposées de manière adjacente ; chaque anode du premier groupe d'anodes est connectée avec l'anode du redresseur ; au moins un premier groupe de rouleaux de guidage parallèle au rouleau conducteur du premier groupe de rouleaux conducteurs; le rouleau de guidage du premier groupe de rouleaux de guidage est disposé en dessous du niveau le plus bas de l'anode du premier groupe d'anodes pour guider l'opération du film dans ledit bain d'électroplacage principal; le rouleau conducteur du premier groupe de rouleaux conducteurs est disposé à une position au-dessus du bain d'électroplacage principal et correspondant à l'anode du premier groupe d'anodes ; chaque paire de rouleaux conducteurs du premier groupe de rouleaux conducteurs est connectée avec la cathode du redresseur; chaque paire de rouleaux conducteurs du premier groupe de rouleaux conducteurs se compose de deux rouleaux conducteurs disposés de manière adjacente et utilisés tour à tour pour être en contact avec les films introduits dans le bain d'électroplacage principal et le film évacué dudit bain d'électroplacage principal ;
ledit équipement d'électroplacage comprend en outre au moins un bain de pré-électroplacage et un deuxième groupe de rouleaux conducteurs en paires non jumelées disposés horizontalement et parallèles les uns aux autres; les rouleaux conducteurs dudit deuxième groupe de rouleaux conducteurs sont parallèles au rouleau conducteur dudit premier groupe de rouleaux conducteurs ; ledit bain de pré-électroplacage est équipé de manière non horizontale d'un deuxième groupe d'anodes dans lequel lesdites paires non jumelées sont parallèles les unes aux autres; chaque paire d'anodes dudit deuxième groupe d'anodes se compose de deux anodes disposées de manière adjacente ; chaque anode du premier groupe d'anodes est connectée avec l'anode du redresseur ; au moins un deuxième groupe de rouleaux de guidage, dont le rouleau de guidage est parallèle au rouleau conducteur du deuxième groupe de rouleaux conducteurs ; le deuxième groupe de rouleaux de guidage est disposé en dessous du niveau le plus bas de la deuxième anode pour guider l'opération du film dans ledit bain de pré-électroplacage ; le rouleau conducteur du deuxième conducteur est disposé à une position au-dessus du bain de pré-électroplacage et correspondant à l'anode du deuxième groupe d'anodes ; chaque paire de rouleaux conducteurs du deuxième groupe de rouleaux conducteurs est connectée avec la cathode du redresseur; chaque paire de rouleaux conducteurs du deuxième groupe de rouleaux conducteurs se compose de deux rouleaux conducteurs disposés de manière adjacente et utilisés tour à tour pour être en contact avec les films introduits dans le bain de pré-électroplacage et le film évacué dudit bain de pré-électroplacage ; un quatrième rouleau de guidage étant disposé entre le bain de pré-électroplacage et ledit bain d'électroplacage principal et disposé parallèle aux rouleaux conducteurs dans le premier groupe de rouleaux conducteurs.

9. Procédé selon la revendication 8, dans lequel il y a deux bains d'électroplacage principaux dans chacun desquels il y a un rouleau de guidage dans le premier groupe de rouleaux de guidage ; ladite première anode est disposée verticalement ; il y a deux paires desdits premiers groupes d'anodes et desdits premiers groupes de rouleaux conducteurs; il y a deux deuxièmes groupes de rouleaux de guidage dans le bain de pré-électroplacage ; lesdites deuxièmes anodes sont une paire d'anodes disposées verticalement; il y a une paire des deuxièmes groupes de rouleaux conducteurs ; un troisième rouleau de guidage est disposé sur un côté adjacent à la machine de déroulage au-dessus du bain de pré-électroplacage et parallèle au rouleau conducteur du deuxième groupe de rouleaux conducteurs; de préférence, dans lequel chaque rouleau conducteur des premier et deuxième groupes de rouleaux conducteurs est respectivement connecté avec l'unité de transmission qui peut créer un mouvement co-rotatif ou contra-rotatif de chaque rouleau conducteur des premier et deuxième groupes de rouleaux conducteurs à la même vitesse de défilement.

10. Procédé selon la revendication 9, dans lequel la distance verticale entre chaque paire de rouleaux conducteurs du premier groupe de rouleaux conducteurs et le bain d'électroplacage principal peut être réglée ; la distance entre deux rouleaux conducteurs adjacents l'un à l'autre dudit premier groupe de rouleaux conducteurs peut être réglée ; la distance verticale entre chaque paire de rouleaux conducteurs du deuxième groupe de rouleaux conducteurs et le bain de pré-électroplacage peut être réglée ; la distance entre deux rouleaux conducteurs adjacents l'un à l'autre dudit deuxième groupe de rouleaux conducteurs peut être réglée.

11. Procédé selon la revendication 10, comprenant l'étape de pré-électroplacage et l'étape d'électroplacage principal, le réglage de la distance verticale entre les rouleaux conducteurs desdits premier et groupes de rouleaux conducteurs et la surface de bain dans lesdits bains d'électroplacage principal et de pré-électroplacage, pour faire en sorte que la distance verticale entre le niveau le plus bas auquel sont positionnées les surfaces extérieures de chaque paire de rouleaux conducteurs desdits premier et groupes de rouleaux conducteurs et la surface de bain soit dans une plage de 3 à 20 mm.

12. Procédé selon la revendication 10, dans lequel le pré-placage est réalisé dans les conditions d'une température d'électroplacage de 20 à 28 °C, d'une densité de courant cathodique moyenne de 10 à 40 ampères/décimètre², et d'une vitesse de défilement du film de 10 à 50 m/h ; le placage principal est réalisé dans les conditions d'une température d'électroplacage de 20 à 28 °C, d'une densité de courant cathodique moyenne de 2 à 15 ampères/décimètre², et d'une vitesse de défilement du film de 10 à 50 m/h.

13. Procédé selon la revendication 12, dans lequel le pré-placage est réalisé dans les conditions d'une température d'électroplacage de 20 à 25 °C, d'une densité de courant cathodique moyenne de 15 à 25 ampères/décimètre², et d'une vitesse de défilement du film de 15 à 30 m/h ; le placage principal est réalisé dans les conditions d'une température d'électroplacage de 20 à 25 °C, d'une densité de courant cathodique moyenne de 5 à 10 ampères/décimètre², et d'une vitesse de défilement du film de 15 à 30 m/h ; de préférence, le procédé comprenant en outre l'étape de passivation après électroplacage, dans lequel ladite passivation est réalisée à une température de 20 à 30 °C, une vitesse de défilement du film de 10 à 50 m/h ; la solution de passivation utilisée pour la passivation comprend une solution aqueuse comprenant 0,2 à 5 g/l de benzotriazole.

14. Procédé selon la revendication 12, dans lequel la solution d'électroplacage utilisée pour l'électroplacage comprend 60 à 150 g/l de sulfate de cuivre, 60 à 150 g/l d'acide sulfurique, 0,1 à 0,3 ml/l d'acide chlorhydrique et 5 à 15 ml/l d'additifs.

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