(19)
(11) EP 2 627 478 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
02.08.2017 Bulletin 2017/31

(45) Mention of the grant of the patent:
31.05.2017 Bulletin 2017/22

(21) Application number: 11773633.0

(22) Date of filing: 11.10.2011
(51) International Patent Classification (IPC): 
B24B 37/26(2012.01)
 B24B 37/24(2012.01)
(86) International application number:
PCT/US2011/055796
(87) International publication number:
WO 2012/051197 (19.04.2012 Gazette 2012/16)

(54)

POLISHING PAD WITH MULTI-MODAL DISTRIBUTION OF PORE DIAMETERS

POLIERKISSEN MIT MULTIMODALER VERTEILUNG VON PORENDURCHMESSERN

TAMPONS DE POLISSAGE AVEC DISTRIBUTION MULTIMODALE DES DIAMÈTRES DES PORES

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 27.12.2010 US 979123
15.10.2010 US 393746 P

(43) Date of publication of application:
21.08.2013 Bulletin 2013/34

(73) Proprietor: Cabot Microelectronics Corporation
Aurora, Illinois 60504 (US)

(72) Inventors:
  • HUANG, Ping
    Beaverton, OR 97006 (US)
  • SCOTT, Diane
    Portland, OR 97212 (US)
  • LACASSE, James, P.
    Portland, OR 97229 (US)
  • ALLISON, William C.
    Beaverton, OR 97006 (US)

(74) Representative: J A Kemp 
14 South Square Gray's Inn
London WC1R 5JJ
London WC1R 5JJ (GB)


(56) References cited: : 
US-A1- 2003 220 061
 US-A1- 2009 053 976
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).