(19)
(11)
EP 2 627 804 A1
(12)
(43)
Date of publication:
21.08.2013
Bulletin 2013/34
(21)
Application number:
11779119.4
(22)
Date of filing:
14.10.2011
(51)
International Patent Classification (IPC):
C30B
29/40
(2006.01)
C30B
25/18
(2006.01)
C30B
23/02
(2006.01)
C30B
33/06
(2006.01)
(86)
International application number:
PCT/EP2011/068015
(87)
International publication number:
WO 2012/049304
(
19.04.2012
Gazette 2012/16)
(84)
Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
(30)
Priority:
14.10.2010
US 393135 P
(71)
Applicant:
Kewar Holdings S.A.
1840 Luxembourg (LU)
(72)
Inventors:
MEYER, Bernd
44143 Dortmund (DE)
NIKOLAEV, Vladimir
St. Petersburg 197348 (RU)
(74)
Representative:
Papula Oy
P.O. Box 981
00101 Helsinki
00101 Helsinki (FI)
(54)
METHOD FOR FABRICATING A FREE-STANDING GROUP III NITRIDE SUBSTRATE