(19)

(11)

EP 2 638 182 A1

(12)

(43) Date of publication: 18.09.2013 Bulletin 2013/38 (21) Application number: 10778640.2 (22) Date of filing: 11.11.2010

(51) International Patent Classification (IPC):  C23C 14/32(2006.01) H01J 37/32(2006.01) (86) International application number: PCT/EP2010/067301 (87) International publication number: WO 2012/062369 (18.05.2012 Gazette 2012/20)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (71) Applicant: NCI - Swissnanocoat SA 1400 Yverdon-les-Bains (CH)	(72) Inventor: MIKHAÏLOV, Sergueï CH-2014 Bôle (CH) (74) Representative: P&TS SA (AG, Ltd.)  Av. J.-J. Rousseau 4 P.O. Box 2848 2001 Neuchâtel 2001 Neuchâtel (CH)