(19)
(11) EP 2 639 345 A8

(12) CORRECTED EUROPEAN PATENT APPLICATION
published in accordance with Art. 153(4) EPC

(15) Correction information:
Corrected version no 1 (W1 A1)

(48) Corrigendum issued on:
20.11.2013 Bulletin 2013/47

(43) Date of publication:
18.09.2013 Bulletin 2013/38

(21) Application number: 11840361.7

(22) Date of filing: 09.11.2011
(51) International Patent Classification (IPC): 
C30B 29/38(2006.01)
(86) International application number:
PCT/JP2011/075793
(87) International publication number:
WO 2012/063853 (18.05.2012 Gazette 2012/20)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 10.11.2010 JP 2010252364

(71) Applicants:
  • Fujikura Ltd.
    Tokyo 135-8512 (JP)
  • National Institute of Advanced Industrial Science and Technology
    Tokyo 100-8921 (JP)

(72) Inventors:
  • KAMATA Hiroyuki
    Sakura-shi Chiba 285-8550 (JP)
  • KATOU Tomohisa
    Tsukuba-shi Ibaraki 305-8568 (JP)
  • NAGAI Ichiro
    Tsukuba-shi Ibaraki 305-0033 (JP)
  • MIURA Tomonori
    Tsukuba-shi Ibaraki 305-8568 (JP)

(74) Representative: HOFFMANN EITLE 
Patent- und Rechtsanwälte Arabellastrasse 4
81925 München
81925 München (DE)

   


(54) APPARATUS AND METHOD FOR PRODUCTION OF ALUMINUM NITRIDE SINGLE CRYSTAL


(57) The invention is an apparatus for production of an aluminum nitride single crystal that produces the aluminum nitride single crystal by heating an aluminum nitride raw material to sublimate the raw material, thereby to recrystallize the aluminum nitride onto a seed crystal, which includes a growth vessel that accommodates the aluminum nitride raw material, and is composed of a material that has corrosion resistance with respect to the aluminum gas generated upon sublimation of the aluminum nitride raw material, and a heating element that is arranged on the outside of the growth vessel, and heats the aluminum nitride raw material through the growth vessel, wherein the growth vessel includes a main body which has an accommodation section that accommodates the aluminum nitride and a lid which seals the accommodation section of the main body hermetically, and wherein the heating element is composed of a metal material containing tungsten.