(19)
(11) EP 2 641 044 A1

(12)

(43) Date of publication:
25.09.2013 Bulletin 2013/39

(21) Application number: 11842423.3

(22) Date of filing: 08.11.2011
(51) International Patent Classification (IPC): 
F25J 3/08(2006.01)
(86) International application number:
PCT/US2011/059711
(87) International publication number:
WO 2012/067892 (24.05.2012 Gazette 2012/21)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 17.11.2010 US 414702 P

(71) Applicant: Praxair Technology, Inc.
Danbury, CT 06810 (US)

(72) Inventors:
  • SUN, Zhijie
    Shanghai (CN)
  • XIE, De-Cheng
    Shanghai (CN)
  • CHENG, Alan, T.
    Naperville, IL 60564 (US)

(74) Representative: Schwan - Schwan - Schorer 
Bauerstrasse 22
80796 München
80796 München (DE)

   


(54) SYSTEM AND METHOD FOR PURIFICATION OF SILANE USING LIQUID NITROGEN IN A POLYSILICON PRODUCTION PROCESS