(19)

(11)

EP 2 641 268 A2

(12)

(88) Date of publication A3: 16.08.2012 (43) Date of publication: 25.09.2013 Bulletin 2013/39 (21) Application number: 11841143.8 (22) Date of filing: 18.11.2011

(51) International Patent Classification (IPC):  H01L 21/304(2006.01) (86) International application number: PCT/US2011/061312 (87) International publication number: WO 2012/068428 (24.05.2012 Gazette 2012/21)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 18.11.2010 US 415015 P (71) Applicant: Cabot Microelectronics Corporation Aurora, Illinois 60504 (US)	(72) Inventors: NEWELL, Kelly Illinois 60504 (US) PRASAD, Abaneshwar Illinois 60504 (US) (74) Representative: Liesegang, Eva  Boehmert & Boehmert Pettenkoferstrasse 20-22 80336 München 80336 München (DE)