(84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
(30) |
Priority: |
28.01.2011 US 201161437422 P 29.03.2011 US 201161468843 P 19.08.2011 US 201161525540 P 23.11.2010 US 416444 P 29.03.2011 US 201161468832 P
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(71) |
Applicant: Advanced Technology Materials, Inc. |
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Danbury, CT 06810 (US) |
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(72) |
Inventors: |
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- WARE, Donald
Woodbury, MN 55125 (US)
- TOM, Glenn
Bloomington, MN 55438 (US)
- CHISM, Richard
Round Rock, TX 78665 (US)
- NELSON, Greg
Minneapolis, MN 55417 (US)
- DUBOIS, Lawrence, H.
Danbury, CT 06811 (US)
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(74) |
Representative: Elsworth, Dominic Stephen |
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Hargreaves Elsworth
14-18 Westgate Road Newcastle-upon-Tyne NE1 3NN Newcastle-upon-Tyne NE1 3NN (GB) |
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