(19)
(11) EP 2 644 893 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
23.08.2017 Bulletin 2017/34

(43) Date of publication A2:
02.10.2013 Bulletin 2013/40

(21) Application number: 13001550.6

(22) Date of filing: 26.03.2013
(51) International Patent Classification (IPC): 
F04C 23/00(2006.01)
F04D 25/16(2006.01)
 F04D 19/04(2006.01)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME

(30) Priority: 30.03.2012 JP 2012080559

(71) Applicant: EBARA CORPORATION
Ohta-ku, Tokyo (JP)

(72) Inventors:
  • Kawasaki, Hiroyuki
    Tokyo (JP)
  • Sobukawa, Hiroshi
    Tokyo (JP)
  • Oyama, Atsushi
    Tokyo (JP)

(74) Representative: Emde, Eric 
Wagner & Geyer Gewürzmühlstrasse 5
80538 München
80538 München (DE)

   


(54) Vacuum evacuation apparatus


(57) The present invention relates to a vacuum evacuation apparatus which can be mounted in a posture that can freely be selected a vacuum evacuation apparatus for evacuating a container from an atmospheric pressure to a high vacuum or less includes a first vacuum pump for evacuating the container to a high vacuum or less, and a second vacuum pump for evacuating the container from an atmospheric pressure to a medium or low vacuum the first vacuum pump and the second vacuum pump are integrally connected to each other into an integral unit.







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Search report