(19)
(11) EP 2 647 955 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
19.12.2018 Bulletin 2018/51

(45) Mention of the grant of the patent:
31.10.2018 Bulletin 2018/44

(21) Application number: 13001719.7

(22) Date of filing: 04.04.2013
(51) International Patent Classification (IPC): 
G01C 19/5776(2012.01)
 G01C 19/5726(2012.01)

(54)

MEMS device quadrature phase shift cancellation

MEMS-Vorrichtung mit Quadraturphasenverschiebungsauslöschung

Annulation du déphasage de quadrature de dispositif MEMS

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 05.04.2012 US 201261620653 P

(43) Date of publication of application:
09.10.2013 Bulletin 2013/41

(73) Proprietor: Fairchild Semiconductor Corporation
Phoenix, AZ 85008 (US)

(72) Inventors:
  • Opris, Ion
    San Jose, California 95138 (US)
  • Tao, Hai
    Sunnyvale, California 94087 (US)
  • Lee, Shungneng
    Sunnyvale, California 94087 (US)

(74) Representative: Schmidt, Steffen J. 
Wuesthoff & Wuesthoff Patentanwälte PartG mbB Schweigerstrasse 2
81541 München
81541 München (DE)


(56) References cited: : 
US-A- 5 600 064
US-B2- 7 054 778
 US-A1- 2005 274 181
   
  • GUO-MING XIA ET AL: "Phase correction in digital self-oscillation drive circuit for improve silicon MEMS gyroscope bias stability", SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY (ICSICT), 2010 10TH IEEE INTERNATIONAL CONFERENCE ON, IEEE, PISCATAWAY, NJ, USA, 1 November 2010 (2010-11-01), pages 1416-1418, XP031835229, ISBN: 978-1-4244-5797-7
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).