(19)
(11) EP 2 655 015 A2

(12)

(88) Date of publication A3:
13.12.2012

(43) Date of publication:
30.10.2013 Bulletin 2013/44

(21) Application number: 11832158.7

(22) Date of filing: 20.12.2011
(51) International Patent Classification (IPC): 
B24D 18/00(2006.01)
B24D 3/34(2006.01)
B24D 7/02(2006.01)
B24B 53/017(2012.01)
B24D 3/06(2006.01)
(86) International application number:
PCT/US2011/065970
(87) International publication number:
WO 2012/088004 (28.06.2012 Gazette 2012/26)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 20.12.2010 US 201061424870 P

(71) Applicant: Diamond Innovations, Inc.
Worthington, OH 43229 (US)

(72) Inventors:
  • RULAND, Gary, E.
    Warner Robins GA 31088 (US)
  • RAREY, Charles
    Lewis Center OH 43035 (US)
  • EASLEY, Thomas, Charles
    Bexley OH 43209 (US)
  • GRAHAM, James
    Gahanna OH 43230 (US)
  • SCHWEIZER, Mark
    Powell OH 43065 (US)

(74) Representative: SetrĂ©us, Ellen et al
Sandvik Intellectual Property AB
811 81 Sandviken
811 81 Sandviken (SE)

   


(54) CMP PAD CONDITIONING TOOL