(19)
(11) EP 2 655 247 A1

(12)

(43) Date of publication:
30.10.2013 Bulletin 2013/44

(21) Application number: 11806053.2

(22) Date of filing: 13.12.2011
(51) International Patent Classification (IPC): 
C01B 6/04(2006.01)
C01B 33/107(2006.01)
C25B 1/18(2006.01)
C01B 33/04(2006.01)
C25B 1/14(2006.01)
(86) International application number:
PCT/US2011/064545
(87) International publication number:
WO 2012/087653 (28.06.2012 Gazette 2012/26)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 23.12.2010 US 978189
23.12.2010 US 978209

(71) Applicant: MEMC Electronic Materials, Inc.
St. Peters, MO 63376 (US)

(72) Inventors:
  • GUPTA, Puneet
    St. Peters, Missouri 63376 (US)
  • ERK, Henry Frank
    St. Peters, Missouri 63376 (US)
  • GRABBE, Alexis
    St. Peters, Missouri 63376 (US)

(74) Representative: Maiwald Patentanwalts GmbH 
Elisenhof Elisenstrasse 3
80335 München
80335 München (DE)

   


(54) METHODS AND SYSTEMS FOR PRODUCING SILANE