(19)

(11)

EP 2 659 517 A2

(12)

(88) Date of publication A3: 08.11.2012 (43) Date of publication: 06.11.2013 Bulletin 2013/45 (21) Application number: 11852246.5 (22) Date of filing: 22.12.2011

(51) International Patent Classification (IPC):  H01L 31/042(2006.01) H01L 31/18(2006.01) (86) International application number: PCT/US2011/066957 (87) International publication number: WO 2012/092145 (05.07.2012 Gazette 2012/27)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 29.12.2010 US 980424 29.12.2010 US 980427 (71) Applicant: Gtat Corporation Nashua, NH 03063 (US)

(72) Inventors: PETTI, Christopher J. Mountain View California 94041 (US) HILALI, Mohamed M. Jacksonville FL 32224 (US) SMICK, Theodore Essex Massachusetts 01929 (US) MURALI, Venkatesan San Jose California 95120 (US) JACKSON, Kathy J. Felton California 95018 (US) LI, Zhiyong Los Altos California 94022 (US) PRABHU, Gopalakrishna San Jose California 95136 (US) (74) Representative: Williams, Lisa Estelle  Haseltine Lake LLP Redcliff Quay 120 Redcliff Street Bristol BS1 6HU Bristol BS1 6HU (GB)