(19)

(11)

EP 2 659 521 A2

(12)

(88) Date of publication A3: 11.10.2012 (43) Date of publication: 06.11.2013 Bulletin 2013/45 (21) Application number: 11854117.6 (22) Date of filing: 20.12.2011

(51) International Patent Classification (IPC):  H01L 31/18(2006.01) H01L 21/67(2006.01) H01L 31/042(2006.01) H01L 21/265(2006.01) (86) International application number: PCT/US2011/066195 (87) International publication number: WO 2012/092026 (05.07.2012 Gazette 2012/27)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 29.12.2010 US 980424 21.07.2011 US 201161510477 P 21.07.2011 US 201161510476 P 21.07.2011 US 201161510478 P 21.07.2011 US 201161510475 P (71) Applicant: Gtat Corporation Nashua, NH 03063 (US)

(72) Inventors: KELL, Adam Orinda, CA 94563 (US) CLARK-PHELPS, Robert Northborough, MA 01532 (US) GILLESPIE, Joseph, D. Boston, MA 02118 (US) PRABHU, Gopal San Jose, CA 95136 (US) SAKASE, Takao Rowley, MA 01969 (US) SMICK, Theodore, H. Essex, MA 01929 (US) ZUNIGA, Steve Soquel, CA 95073 (US) BABABYAN, Steve Los Altos, CA 94024 (US) (74) Representative: Williams, Lisa Estelle  Haseltine Lake LLP Redcliff Quay 120 Redcliff Street Bristol BS1 6HU Bristol BS1 6HU (GB)