(19)
(11) EP 2 660 860 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
09.12.2020 Bulletin 2020/50

(45) Mention of the grant of the patent:
21.10.2020 Bulletin 2020/43

(21) Application number: 11853539.2

(22) Date of filing: 20.12.2011
(51) International Patent Classification (IPC): 
H01L 21/683(2006.01)
 H01L 21/67(2006.01)
(86) International application number:
PCT/JP2011/079478
(87) International publication number:
WO 2012/090782 (05.07.2012 Gazette 2012/27)

(54)

WORK HEATING DEVICE AND WORK TREATMENT DEVICE

WERKSTÜCKERWÄRMUNGSVORRICHTUNG UND WERKSTÜCKBEHANDLUNGSVORRICHTUNG

DISPOSITIF DE CHAUFFAGE DE PIÈCE À TRAVAILLER ET DISPOSITIF DE TRAITEMENT DE PIÈCE À TRAVAILLER

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 27.12.2010 JP 2010290201

(43) Date of publication of application:
06.11.2013 Bulletin 2013/45

(73) Proprietor: Creative Technology Corporation
Kawasaki-shi, Kanagawa 213-0034 (JP)

(72) Inventors:
  • TATSUMI Yoshiaki
    Kawasaki-shi Kanagawa 213-0034 (JP)
  • KAWAE Megumu
    Kawasaki-shi Kanagawa 213-0034 (JP)
  • TEMMA Yasuyuki
    Kawasaki-shi Kanagawa 213-0034 (JP)
  • SUGAWARA Toshifumi
    Kawasaki-shi Kanagawa 213-0034 (JP)

(74) Representative: Vossius & Partner Patentanwälte Rechtsanwälte mbB 
Siebertstrasse 3
81675 München
81675 München (DE)


(56) References cited: : 
JP-A- 11 111 829
JP-A- 2003 124 298
JP-A- 2007 129 142
 JP-A- H11 111 829
JP-A- 2003 124 298
   
  • ANONYMOUS: "Double-Sided Electrostatic Chuck", IBM TECHNICAL DISCLOSURE BULLETIN, vol. 32, no. 5B, 1 October 1989 (1989-10-01), pages 35-36, XP002735432, New York, US
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).